Interference Filter Of Reflectance In 650nm And Transmittance In 10.6μm

With the development of atmospheric optical communication, requirement for high performance optical elements is increasing. The technique of thin film has played an important role in the improvement of system performance.This paper introduces the preparation process of the coatings reflectance at 650nm and transmitting in 10.6μm. By analyzing the optical and physical character of the materials, the substrates of multi-spectrum zinc sulfide, ZnS and YbF₃ were used. The coatings were designed and optimized by software, and prepared by TXX700 vacuum coating machine with electron beam and ion assisted deposition system. The methods for improving the adhesion of layers was studied by a series of experiments. Finally we gave the measurement results.