Improvement Of The Reflectometer In National Synchrotron Radiation Laboratory

The reflectometer in spectral radiation standard and metrology beamline of Hefei national synchrotron radiation laboratory is mainly undertakes the measurement of reflectance and transmittance of vavious reflecting coatings. In the use of this instrument, some problems are found that can seriously affect its efficiency and accuracy. As the incident and reflected light can't be measured at the same time, the accuracy of the measurement is badly dependent on the stability of the light source. The change of the sample to be tested takes a lot of time, and the operation of this reflectometer is labourious.The purpose of this paper is try to solve these problems. Some new structures are design based on the ground that little change is made to the original setup. The main measures that have been taken including:Adding a extra detector to measure the incident light. Thus makes the simultaneous measurement of incident and reflected light possible.A vacuum lock and a sample transferring structure is designed and added by lengthening the original chamber. The new part of the chamber is connected to the main part via a existing flange. Thus the samples can be put in and taken out without breaking vacuum, and the measurement effiency is greatly improved.The stand for foils filter is re-designed to make it highly utilized.The door of the vacuum chamber is re-designed so the operation become much easier than before.The vacuum performance of the new chamber is checked and some key components are analyzed with ANSYS during the design. It is estimated that with these improvement the accuracy can greatly increased and the efficiency of the reflectometer can raise at least 3 times.