The Diagnose Of Radio Frequency Inductive Coupled Ar Plasma With Langmuir Probe And Emission Spectrum

For the experiment, the cylindrical radio frequency (rf) inductively coupled Argon plasma has been studied by Langmuir probe and emission spectrum. In the experiment, the parameters of the plasma varies with pressure in axial and radial direction has been measured which there is nothing adding between the antenna coils. The emission intensity of Ar atom and Ar~+ ion varies with pressure in axial direction were also measured. The effect of cusp magnetic field to plasma was studied. The plasma parameters with and without cusp magnetic field have measured which varies with pressure and power in axial and radial direction, and the comparisons of them are also showed.When nothing is added between antenna coils, by measuring it can know it produce uniform, stable and high density plasma in the middle and top of the discharge chamber, but it falls at the target, and below the middle of the chamber the plasma weakens slowly; in radial of 6-7 cm the plasma parameters are change slightly, also produce uniform stable plasma. The parameters change rapidly at the edge of the chamber. And using the emission spectra measured the intensity of Ar atom of 750.3 nm in plasma in axis with pressure, the intensity of Ar~+ ion of 434.8 nm varied with the pressure in the axis and the ratio of 434.8 nm Ar~+ ion to the 430.0 nm Ar atom varied with pressure in three position of the axis were also measured. The effect of the cusp magnetic field to the plasma has been studied in the experiment. In the experiment, it was found that when adding the magnets between the antenna coils, the rf power will be absorbed by them, for the same condition with adding cusp magnetic field so the condition of without cusp magnetic field is instead of by adding stainless steel rings. When adding the cusp magnetic field between the antenna coils, the plasma density increased gradually in axial direction. And the values are larger than without magnetic field obviously. In radial direction, the plasma density increased gradually, and reached its maximum near the chamber wall where the strength of the magnetic field is largest. But at chamber wall the plasma density decreased rapidly and reached the minimum. Without the cusp magnetic field, the plasma density decreased rapidly near the chamber and also reached the minimum at the wall. The plasma density increased and the distribution in radial direction became more uniform when adding the cusp magnetic field. In the experiment, the electron temperature plasma potential varied with pressure and power in axial and radial direction with and without...