| In the laser inertial confinement fusion (ICF) field, the amorphous hydrogenated carbon (α:CH) often serves as the microballoons surface material to study the implosion dynamics because of its special performance. With ICF research work developing, the precise diagnosis requests urgently CxH1-x doping with the medium or high Z element (Specially Ge, Br, Se and so on) to make the target material.In order to make the gradient bromating amorphous hydrogenated carbon film, this article first manufactured the automation to control the Mass-Flow-Control which is produced by MKS Corporation, and has compiled this equipment automation control procedure using the VB senior programming language. The interface's electric circuit and the control program can be transplantated to other micro voltage control equipment very easily.Then we take the C2H5Br and the hydrogen (H2) as the source gas to deposite the gradient bromating amorphous hydrogenated carbon film in the improved low-pressure plasma polymerization unit. At last we obtain the sample's permease spectrum using the Perkinelmer Lambdal2 and employ it to compute the sample's optical band gap; By using of Fourier transformed infrared light spectrum and X beam light electronic energy spectrum, we analyze the chemical bond in the film as well as the oxygen carbon element ratio and the bromine carbon element ratio.The main results are expressed as follows:The flow of the hydrogen influences the deposition speed of the thin film, and the inverse ratio of the former to the latter is obtained. With the flow of the hydrogen increasing, the thin film, which adheres to substrate, is easy to fall off. It is found...
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