Experimental Study Of Radiation Characteristic Of Mo/Si Multiplayer Mirror In EUV Range

In this dissertation, we study the reflectivity variation of Mo/Si multilayer mirror irradiated by charged particles.First we discuss the mechanism of interaction between charged particles and material based on the theory of radiation damage, including collision of particles and lattice atom, scatter section, energy loss of the ion and the radiation effects in different materials.Then we design and set up a reflectivity measurement system, consisting of laser-pulse-plasma, concave grating monochromator and photoelectric detector; discuss the advantages of each component respectively; find solutions to the problems that affect the measurement stability; and calibrate the wavelength and reflectivity measure of the system.At last we study the radiation characteristic of the Mo/Si multilayer mirror, measure the mirror's reflectivity before and after electron and proton irradiation, the experimental results indicate that the reflectivity of the Mo/Si multilayer mirror reduce by 1%~3% after high energy electron irradiation, the wavelength corresponding to peak reflectivity changes by 0.3nm.; and the reflectivity isn't changed, but the wavelength corresponding to peak value varies 0.2nm after proton irradiation. We analyse the mechanism of reflectivity reduction caused by charged particles radiation.