Ultra-short-period W/B(4)C multilayers for X-ray optics-microstructure limits on reflectivity

Posted on:1998-06-19

Degree:Ph.D

Type:Dissertation

University:University of California, Berkeley

Candidate:Walton, Christopher Charles

Full Text:PDF

GTID:1460390014974927

Subject:Engineering

Abstract/Summary:

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W/B{dollar}sb4{dollar}C multilayer thin films were fabricated by magnetron sputtering on Si(111) substrates for applications as linear polarizing optical elements for soft x-rays, with periods from 48A to as little as 4.7A. The x-ray reflectivity measured at {dollar}lambda{dollar} = 1.54A and at 45{dollar}spcirc{dollar} incidence {dollar}rm(14.4A

Keywords/Search Tags:

Multilayer, Layers, Reflectivity, X-ray, Periods

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