Soft X-ray Laser Multilayer Mirror And Spectral Components Developed

A brief review on x-ray source and x-ray optical components as well as the present status of research and development for x-ray multilayers was illustrated in the first chapter of this paper.And in the second chapter the theoretical design and performance analysis of x-ray multiplayer mirrors were discussed. The traditional optical thin film theory was successfully applied in the design of x-ray multilayers. Some computer programs were composed for designing and analyzing x-ray multilayer characteristics.The deposition technology was introduced in the third chapter. A technique of rotation-speed thickness monitor, a very effective monitoring method in depositing x-ray multilayers, was developed in our work. And the thickness of ultra-thin layer was derived from small angle x-ray diffraction using the Bragg's equation with a refraction correction. Also the testing results of x-ray multilayer mirrors were presented in the third chapter. A high reflectivity of about 50% at wavelength of 13.9nm was acquired by synchrotron radiation reflecto-meter. And an average reflectivity of 26.2% was obtained at 13.1nm with an incidence angle of 45?, which reached the 70 percent of theory value and was one of the highest reflectivity among the reported results. The influence of roughness on the reflectance of soil x-ray multilayer coating was presented from theoretical and experimental analysis, and an optimal fitting method was given for x-ray multilayer mirrors design. It was important for improving the performance of x-ray multilayer.In the chapter four we discussed the fabrication and performance test of beam splitters for soft x-rays. The x-ray multilayer without substrate supporting (substrate-free multilayer) was prepared and the characteristics of x-ray beam splitter were measured successfully for the first time in our country.