Research Of On-chip Integrated Photonic Devices Based On Functional Polymer Waveguide Materials

With the rapid development of semiconductor manufacturing process technique,classical photonic integrated circuits（PICs）have enabled large-scale on-chip photonic information modulation.Optical waveguides,as the core fundamental components,play an essential role in communication fields for data transmission,information processing,and signal acquisition.First of all,optical waveguide devices can be miniaturized,multifunctional,and compatible with CMOS process to realize on-chip photonic transmitter devices.At the same time,a variety of active and passive optical waveguide devices have been widely used in optical fiber communication systems,using optical switches can be rapid routing of photonic signals,forming a high capacity,fast transmission speed,easy expansion of fiber to the home（Fiber To The Home,FTTH）.Second,optical waveguides can be selected as highly sensitive,anti-emagnetic interference photonic devices capable of receiving changes in a variety of physical and chemical parameters for real-time,high-speed detection signal reception,and acquisition.As a result,the utilization of on-chip photonic integration technology to realize multi-functional optical waveguide devices with high speed,low loss,high stability,and low cost will create significant application value.Based on the above research significance,this paper designs and fabricates active integrated photonic information generation,data transmission control,and information acquisition optical waveguide devices with various of autonomously synthesized multifunctional polymeric optical waveguide materials.The detailed property analysis of the waveguide materials and functional measurements of the waveguide devices were introduced,mainly including the following aspects:1.For the study of on-chip integrated photonic devices objected to functional polymer waveguide materials in this paper,the theoretical study of the characteristic equations of the conduction modes of asymmetric three-layer/multi-layer flat waveguides and asymmetric three-layer/multi-layer metal-cladding waveguides are presented.The structure and principle of Mach-Zehnder interference（MZI）modulation optical waveguides are explained for switched single components;the operating principle of multi-mode interference（MMI）optical waveguide devices is derived;the mode coupling theory of Bragg waveguide grating is introduced,and the reflection wavelength and coupling coefficient are analyzed and calculated;the quality factor,resonant wavelength,and free spectral region range of microdisk resonant cavity are summarized,and its working principle is analyzed and elaborated.The well-knit theoretical foundation is laid for the subsequent experimental fabrication.2.Two kinds of three-dimensional（3D）photonic information-generating waveguide devices based on fluorescent polymer TCBz C/SU-8 and TCNz C/SU-8waveguide materials were proposed.The gain fluorescent polymer was used as the core layer of the waveguide,and the synthesized P（MMA-co-GMA）was selected as the cladding layer of the multilayer waveguide.First,an on-chip dual-layer light source emitter device based on microdisk structure was designed and fabricated by UV-direct writing process.The function of synchronous light source emission in horizontal and vertical directions on a single chip was realized.The average gain coefficients of the TCBz C/SU-8 and TCNz C/SU-8 waveguides were measured as 137 and 117 d B/W for the horizontal light source emission.66 and 31 d B/W for the vertical light source emission,respectively.The average gain coefficient of the white light source in the double-layer photonic emitter device was measured to be 112 d B/W by fiber vertical coupling.The rise and fall response times of the on-chip white light source emitting waveguide device were 60 and 80μs,respectively,under the action of pulse modulated pumping light,demonstrating the promising application of this technology in the realization of 3D integrated light source emission and optical display.Then,a dual-layer fluorescent encrypted polymer waveguide chip based on the optical pulse encoding modulation technique was designed and fabricated.By excitation of external pumping light,encryption image information can be displayed in the vertical direction and digital encoded information with important information can be transmitted in the horizontal direction.By converting the wavelength and frequency of the external pumping light,it is possible to send and warn the receiver that the process of data transmission has been monitored.When the encoded data information is securely transmitted in the underlying waveguide,the relative gain of 532 nm wavelength signal light under pumping light excitation with 100 m W was 5.71 d B,and the response time was 260μs,realizing the study of a 3D multilayer gain-based information-emitting photonic device with high-speed response.3.A thermo-optic（TO）switch for visible,near-infrared wavelengths,and a low-loss tunable interlayer coupler based on metal-printing type technology were designed to realize the high-speed routing control of optical signals in on-chip photonic devices.First,a metal-printing MZI structured waveguide TO switch compatible with 650 and532 nm visible light was designed and fabricated with P（MMA-co-GMA）as the waveguide core layer material.The driving power was 15.2 m W and the extinction ratio was 15.1 d B at 650 nm.The driving power was 14.0 m W and the extinction ratio was18.5 d B at 532 nm.Meanwhile,the response time can reach 400μs for both visible wavelengths for the designed metal-printing MZI waveguide TO switch.The insertion loss and extinction ratio of the waveguide device were measured as 4.5 d B and 19.8 d B at 1550 nm,respectively,and the response time of the low-loss fluorinated polycarbonate material was measured to be 80μs at the driving power of 8.8 m W.The high-speed response optical waveguide device prepared by the bottom metal-printing technique was demonstrated.Finally,a tunable metal-printing interlayer waveguide coupler based on low-loss fluorinated polycarbonate（AF-Ali-PC MA）and P（MMA-co-GMA）was designed and fabricated.The response time of the interlayer coupler is measured to be 250μs and the driving power consumption is 7.6 m W.The fabrication of the TO tunable waveguide device and the study of the photonic information transmission control chip were realized by the efficient metal-printing waveguide process technology combined with the functional polymer optical waveguide material.4.In the context of the above two parts of work,two kinds of on-chip photonic information acquisition sensor devices based on functional polymer materials were designed and fabricated by combining the bottom metal-printing technology and UV-direct writing process method.First,a multimodal response optical waveguide sensor for temperature and humidity based on synthesized cross-linked polymer electrolyte gel（MPOSS-PIL）was designed and realized.The MMI waveguide sensing structure with self-heating electrodes was directly fabricated by the bottom metal-printing process technique.The temperature and humidity sensing characteristics of the polymer electrolyte gel were simulated and analyzed.And the model was constructed with the theory of ion relaxation kinetics.The temperature and humidity sensing sensitivity of the waveguide sensor were 0.5πrad/°C and 1.14 d B/%RH for the temperature detection range of（36.0-38.0°C）and relative humidity range of（45-65%）,respectively.The response times of this multifunctional sensor for temperature and humidity sensing were 4.21 ms and 1.32 s.This study has significant implications for the integrated monitoring of human body signals by multimodal response optical waveguide sensors.Then,a biosensor based on Bragg waveguide grating fabricated by fluorinated cross-linked polymer was investigated to detect the effective drug concentration of Ginkgolide A to inhibit apoptosis of pulmonary microvascular endothelial cells（PMVEC）.A fluorine-containing photosensitive polymer（FSU-8）was synthesized as the core layer of the waveguide sensor,and poly（methyl methacrylate）（PMMA）was used as the cladding material for the sensor window.The structure of the proposed grating was optimized and designed,and the sensitivity of the biosensor was simulated with refractive indices corresponding to different drug concentrations.The waveguide sensors were fabricated by UV-direct writing.The actual sensitivity of the waveguide biosensor was measured to be 1606.2 nm/RIU,with the resolution and detection limits of 0.05 nm and 3×10^-5 RIU,respectively.Based on the experimental results,it can be concluded that the designed functional polymeric waveguide sensor can achieve better photonic signal acquisition of the scalar quantity to be measured.The proposed works utilized on-chip photonic integration technology to achieve multi-functional optical waveguide devices with the advantages of high speed,low loss,and high stability.Combined with a variety of independently synthesized multi-functional polymer optical waveguide materials,the on-chip photonic information generation,data transmission control,and information acquisition optical waveguide devices were designed and fabricated,which could play a significant application in the field of optical communication.