Quasi-optical MEMS switching array technology

During this Ph.D. dissertation research, both experimental and theoretical investigations have been conducted to develop new micro-elecro-mechancical systems (MEMS) based technologies and new device concepts for the microwave and millimeter wave frequency range.; A proof-of-principle E-band (60GHz∼90GHz) MEMS switching array has been successful designed and constructed, where 400 MEMS switches form a two dimensional array on a 2inch x 2inch quartz substrate. The E-band MEMS grid array switch has demonstrated >6 dB maximum isolation at 76 GHz and >10 dB on/off contrast ratio at 70∼85 GHz.; Extensive work has been carried out with the aim of developing a compact impedance matching method for quasi-optic grid arrays. A new device concept is presented, where bulk micro-machining techniques are utilized to create a new class of artificial materials with continuously variable dielectric constant for use in millimeter wave quasi-optical systems. Based on this bulk micro-machined material, two novel quasi-optical impedance transformers have been modeled, designed, and characterized, which provide ideal impedance matching for quasi-optical systems. Photonic bandgap (PBG) RF circuit models also have been studied for microwave and millimeter wave applications.; During the course of this development activity, materials characteristics have been analyzed for their suitability in quasi-optical grid array circuit and RF MEMS device applications. Air bridge MEMS switches have been designed, fabricated and characterized for microwave and millimeter wave applications.