| This paper described a MEMS 0 -π phase shifter used in a phased array of aperture coupled micro-strip patch antenna. Firstly, several methods are presented for the analysis of aperture coupled micro-strip antenna, such as transmission-line method, cavity method. Phase weighting super-resolution method is also proposed. Secondly, a 1×8 linear array is designed and tested. Meantime, many problems such as mutual-coupling between patches, parasitical radiation in the feed line, transformation from waveguide to micro-strip probe, measurement error, fabrication error are carefully studied and solved. Thirdly, the principle of MEMS switch is introduced. The models of MEMS switch in two types are built and simulated with the tool named Ansoft HFSS. Fourthly, switch-line phase shifter is designed and manufactured. Based on all this work, phased array of aperture coupled micro-strip antenna is fabricated. Though adjustment and testing, the measurements meet the requirements. |
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