Monolithically integrated vertical-cavity lasers and resonant detectors for free-space optical interconnects

In this dissertation, a new technique for integrating vertical cavity lasers and resonant-cavity photodetectors for free-space optical interconnects is explored. The work starts with an overview of the device requirements for free-space optical interconnects, specifically the need for integrated VCLs and detectors that are compatible with flip-chip bonding and microlens integration. The lack of a suitable integration technique lead to the development of a new method of integrating VCLs and detectors.; Part of the VCL bottom mirror is oxidized, while the detector structure is left unoxidized, enabling different bottom mirror reflectivities to be achieved. This difference in bottom mirror reflectivity allows individually designed VCLs and resonant-cavity detectors to be monolithically integrated. Since the reflectivity difference is realized in the bottom mirror, the devices have through-the substrate emission and detection, making flip-chip bonding and microlens integration straightforward.; High performance VCLs and resonant-cavity detectors were fabricated using this integration technique. A comprehensive analysis of the devices is performed with the goal of broadening the detector optical bandwidth without causing adverse effects on other device parameters. DC and high-speed device characteristics are presented, including the results of a free-space optical link where the operating temperature of the VCL and detector were independently varied over a wide range. These results demonstrate the potential of this integration technique for meeting the device requirements of free-space optical interconnect systems.