| The modification of silicon surfaces by organic monolayers is of interest in several important applications such as microelectromechanical systems (MEMS), biochip arrays, and molecular electronics. The advantage of a monolayer functionalized surface is the ability to tailor the surface chemical and physical properties at the molecular level. An efficient reaction between alcohol functional groups and the CI-terminated Si substrate has been utilized for surface modification. This approach was successfully applied to MEMS and biochips applications. Polycrystalline Si modified with dodecanol showed low surface energy, reducing the stiction of MEMS structure. Poly (ethylene glycol) grafting on the Si surface with high density was successfully achieved. As a further application, patterning protein molecules was demonstrated via microcontact printing and micromolding in capillaries using dodecanol/PEG and PEG/methyl terminated PEG. Finally, metal-molecule-silicon tunnel junctions fabricated on a silicon crystal designed for attenuated total internal reflection (ATR) Fourier transform infrared spectroscopy was demonstrated as a platform for establishing molecular conformation at buried interfaces in molecular electronics. |
