| Photonic crystal devices are capable of controlling the flow of light in ultra compact scales. Silicon two dimensional (2D) nanostructures are well developed in the integrated circuit (IC) industry. Silicon is transparent to infrared light and has high refractive index which makes silicon an ideal material for photonic crystals in the infrared spectrum. Silicon 2D photonic crystals have attracted a lot of interest for showing feasibility of photonic integrated circuits. Typical photonic crystal devices are waveguides or cavities, which were developed as mostly passive devices. Various methods can be used to make photonic crystals tunable. In this work, silicon 2D tunable photonic crystal devices are studied using thermo-optic effect of silicon. In addition, this research presents one-step lithography to form micro and nano combined structures for the two-dimensional slab photonic crystals. |
