Fabrication And Band Gap Research Of The Two-Dimensional Silicon Photonic Crystals

Photonic crystals are periodic arrangement of different dielectric materials with the formation of a photonic band gap structure, a frequency range of light fall on the band gap will be prohibited to spread, this feature can be used to manipulate light transmission in photonic crystals. Two-dimensional photonic crystal has been fabricated in the N-type silicon substrate by electrochemical etching, the factors including the size of holes, the voltage ratio of corrosion and corrosion solution which effect the properties of photonic bandgap have been analyzed during the fabrication, optimized the process parameters, good experimental preparation conditions have been obtained. we investigated the 2-D air column photonic crystal by time domain simulation using FDTD method, and studied band gap of photon affected by lattice period, lattice structure and air column aperture by analysing the property of transmission of E, H polarization which provide the theoretical background for our research.