Research On Non-resonant Piezoelectric Linear Motors And Their Application In Multi-DOF Platform

In recent years,linear piezoelectric motors show wide applications in many cutting-edge fields for their attractive characteristics of high positioning accuracy,fast response,flexible design,no electromagnetic interference and so on.Linear piezoelectric motors are developing rapidly with the attention of lots of foriegn researchers.Many developed countries push the technology of piezoelectric motor to the development direction of industrialization based on advanced concepts and years of technology accumulation.Especially in the precision platform system,new technologies and new products emerge in endlessly.Under the background of the Made in China 2025,China's core technology development is facing great opportunities and challenges.To research and develop precision platform made by piezoelectric motors with independent intellectual property rights will promote the development of high-precision technology in the new stage of our country.Supported by NSFC(No.51375224)and Produce-Learn-Research projects(CXY2013NH09),this dissertation research on dynamic model,design criteria,simulation analysis,experimental verification and evaluation system on the non-resonant linear piezoelectric motors.Furthermore,the desinged motors have been used in multi degree of freedom moving stage and achieve high precision,large stroke and fast response.To conclude,main contribution of this dissertation are as follows:1.The characteristics,classification and research status of piezoelectric linear motor and multi degree of freedom platform are summarized.Through the investigation of the development,the research status and the application prospect of the piezoelectric linear motor and the multi degree of freedom platform at home and abroad,the significance of the study of the piezoelectric linear motor and its application in the multi degree of freedom platform is summarized.2.According to the research results at home and abroad,the non-resonant piezoelectric linear motor is selected as the research and development object.The performance index of the piezoelectric stack,the working mechanism and design criteria of the stator structure,the general design method of the peripheral structure of the motor are researched.The contact friction model of general piezoelectric linear motor is systematically summarized.3.Based on the existing research results,the modeling method of bipedal driving non-resonant piezoelectric linear motor is proposed.According to the model,a variety of working modes of the motor are analyzed.Three different types of double foot non-resonant piezoelectric linear motor are designed according to the proposed model.The performance of the motor is analyzed by the combination of theory and simulation.The prototype experiments show that three kinds of motors are designed under the guidance of the proposed model(the stroke of the motor is the same with the guide stroke)and the precision is higher(the resolution is 0.1?m).4.A design theory of an inertial non-resonant piezoelectric linear motor is proposed.The mechanism of the motor is analyzed systematically.The structure of the motor is optimized by the combination of theoretical modeling and finite element method.The feasibility of the motor is verified by the experiment.The prototype experiment shows that the optimized motor meets a variety of design requirements: the stator's driving foot longitudinal output displacement is magnified,the input signal frequency and the motor output speed have a better linearity,and the motor resolution is less than 1?m.5.On the basis of analyzing the reasons of various motors performance defects designed in this paper,a kind of double flexible hinge guided laminated non-resonant piezoelectric linear motor is designed.The working principle and performance characteristics of the motor are analyzed and tested.The performance parameters of various motors are summarized,and the quantitative evaluation criteria are put forward.The design and performance test of two degrees of freedom motion platform were carried out with two selected prototype.6.According to the characteristics of the two degree of freedom motion platform developed,a six degree of freedom motion platform is designed.The theoretical model and basic control strategy of the platform are constructed.The motion characteristics of the platform are corrected by simulation analysis.The feasibility of the mechanism is verified through the performance test of each degree of freedom.The tests show that the designed platform has high precision(the translation resolution is less than 1?m,the rotational resolution is less than 0.002 degrees),the larger stroke(the translational stroke is equal to the guide stroke,the rotational stroke is suitable for the high precision application field)and the fast response(the start and stop response time is at dozens of milliseconds).