The Research On Multi-DOF Piezoelectric Micro-displacement Electromechanical System

Based on the analysis of the research results in the area of the multi-DOF (Degree of Freedom) micro-displacement electromechanical systems,a new 3 DOF micro-displacement system is brought out here. The system is novel and easy to manufacturing and use. Meanwhile,the finite element method,the orthogonal test method,and the regressive interpolation are used for the analysis of flexible joint mechanisms,and the optimal parameters of the mechanism are obtained.In chapter One,the background,purpose and significance of the subject are introduced,the history and recent study situation of the micro-displacement system is reviewed,and the main research tasks are list.In chapter Two,the construction principle and techniques of micro-displacement are described. And the theory of the finite element method,the orthogonal test method,and the regressive interpolation are described in chapter Three.In chapter Four,a new 3 DOF micro-displacement systems was brought out based on the analysis of the research results in the area of the multi-DOF micro-displacement electro mechanical systems. The system can get the degrees of x,y and 0,and it can be precisely located.In chapter Five,the flexible joint mechanism was calculated with the finite element method,the orthogonal test method,and the regressive interpolation. And the optimal parameters of the mechanism are obtained.In chapter Six,the stress and strain of 3 DOF micro-displacement working platform with flexible joint was calculated with the finite element method.At last,the conclusions of whole thesis are summarized,and the future research project of the design theory is proposed.