Study On Detection And Manipulation Of Biochemical Molecules Using Thin Film Acoustic Resonators

Detection and manipulation of biochemical molecules are continuously providing possibilities for continued progress in applications of clinical diagnostics and environmental monitoring,etc.Even though novel biochemical sensors and actuators have been developed,researchers are yet trying to develop a new one to meet the following demands: 1)detection of samples with high throughput;2)highly accurate detection using multimode sensing system;3)realizing highly sensitive detection at ultralow concentration;4)realizing manipulation of biochemical molecules.Here,we propose a novel approach to detect and manipulate biochemical molecules using thin film acoustic resonators,which are fabricated via traditional semiconductor manufacturing technology.The main topics of this thesis are listed as follows:1.Three types of thin film acoustic resonators are fabricated with aluminum nitride as the piezoelectric layer via semiconductor manufacturing technology.To illustrate the different applications,these resonators are comparatively analyzed from the aspects of operating mechanism,fabrication process and performance.2.Nano-assembled polyelectrolytes films are used to tune the resonant frequency of FBAR array to the same resonant frequency with high tuning resolution and wide tuning range.We demonstrate the enhancement of reproducibility and reliability of FBAR assembled with nano-assembled polyelectrolytes films.Afterwards,we realize the detection of relative humidity and volatile organic compounds with high sensitivity,high selectivity and high throughput.3.We design and fabricate a multimode on-chip integrated microsystem consisting of solidly mounted resonator(SMR)and extended gate field effect transistor(EGFET)for simultaneous detections of biomolecular interactions.After the comparative analysis between the static and non-static assays for the polyelectrolytes surface assembly and antigen-antibody binding interaction via the microsystem,we demonstrate the critical dependence of signal detection on the type of biochemical sensors,highlighting the importance of operating mechanisms.Furthermore,we illustrate the manipulation of biochemical molecules using SMR in liquid.4.We demonstrate a noninvasive approach to efficiently manipulate the biochemical molecules with SMR and Lamb wave resonator(LWR)from theoretical analysis and experimental verifications.The break of both mass transfer and binding affinity limitations is validated by the improvement of LOD for biomolecular interactions.We further demonstrate the potential extension of LWR by integrating into an optoelectronic bioassay platform which shows markedly enhanced binding affinity.