Research On The Fabrication And Applications Of Top-gate Proton-conductor Based Synaptic Transistors

With the development of integrated circuit technologies,the resolution node of microelectronic fabrication is closing to atomic scale,which is at the physical limitation.At the same time,the performance of chips is also closing to its limitation.Learning from the structure and working methods of biological brain,developing brain-like chips is a new routine to improve the performance of microchips.Synapse is a significant element that connects neurons and plays key role for learning and memory.Research on synaptic electronic devices and their large-scale fabrication is foundation for building brain-like chips.In human brain,information transition relies on ion flux.Solid-state electrolyte materials with proton-conducting functions are utilized to mimic synaptic behaviors.At the electrolyte/semiconductor interface,the ions in the electrolyte and the carriers in the semiconductor will form electrical double layer,which is used to transmit signal transmission and achieve synaptic transistor.This research aims at large scale design and applications of proton-conducting synaptic transistor,designing top-gate synaptic transistors.In the research,using plasma enhanced chemical vapor deposition?PECVD?to deposit SiO₂ solid-state proton-conducting electrolyte film,which forms electrolyte/semiconductor interface with amorphous indium-zinc-oxide??-IZO?film that is deposited by RF sputtering.The devices are fabricated by CMOS-compatible plane patterning technology.Semiconductor analyzer system is used to measure electrical performance and demonstrate synaptic behaviors.The synaptic transistor shows 10⁶ on/off ratio under 1V operation voltage;spiking sequences with 0.3V amplitude are utilized to demonstrate synaptic short-term behaviors:paired pulse facilitation?PPF?,high-frequency filtering.Based on the synaptic network with two top-gate synaptic transistors,this research proposes a scheme to achieve synaptic computation,building fundamental elements for large-scale applications.Besides,according to the low-voltage performance of synaptic transistor,a low-voltage electric-double-layer inverter was demonstrated,which explores the interconnection between neuromorphic devices and logic circuits,also providing a choice for low-voltage applications.This research discuss and explore the fabrication and applications of solid-state synaptic devices,achieving developing of prototype devices and demonstration of its circuit applications,which is promising to promote the research on energy efficient brain-like computation systems.