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The Investigation Of The Key Technology For Semiconductor Laser Face Coating

Posted on:2011-07-01Degree:DoctorType:Dissertation
Country:ChinaCandidate:Z J LiFull Text:PDF
GTID:1118360305990365Subject:Condensed matter physics
Abstract/Summary:PDF Full Text Request
In this dissertation, the research work on the optical coating in the laser diode is presented. To achieve high laser damage threshold for the high power laser diode, the main research contents include:Firstly, based on the laser diode optical coating design theory, the spectral characteristics of 1/4λperiodic multilayer coatings and reflection bandwidth are analyzed, and the loss of the semiconductor laser diode optical coating and the distribution of the electric field intensity of laser in the optical coatings are discussed, for providing a theoretical basis and reference of high laser damage threshold face coating design and fabrication.Secondly, based on semiconductor laser theory, the characteristics of edge emitting semiconductor laser diode which related to optical coating are simulated, including the relationship of threshold current, slope efficiency and output laser power with the reflectance of the before and after the cavity surface optical coatings. Simulation results show that, when the reflectance of before and after cavity surface optical coatings to take the optimum value, the edge emitting semiconductor lasers diode of the output laser power reached the maximum.Thirdly, the semiconductor laser diode face catastrophic optical mirror damage mechanisms are studied. The result show that the main reason of semiconductor lasers producing catastrophic optical mirror damage is the semiconductor laser face surface oxidation, inhibiting the oxidation of the semiconductor laser face surface, it can enhance the laser damage threshold of optical coating, output laser power and device reliability.Fourthly, face coatings of edge emitting semiconductor laser diode are fabricated by passivation of new technologies. The result show that output power of the devices is increased 36% by passivation technologies, and the optical coatings laser damage threshold is improved 36%. The antireflection coatings of vertical cavity surface laser diode are fabricated. The transmittance of antireflection coatings is 99.95%; successfully applied to high-power vertical cavity surface emitting laser production process ang the output power is 2.3W for the aperture of 600μm single-tube device, and it is achieving the leading domestic level.Fifthly, the impact of the oxygen optical coating materials and passivation optical coating materials to semiconductor laser face surface are verified through experiments for the first time. The results show that it is forming Ga2O3 oxide between the oxygen optical coatings and the laser diode wafer material, increasing face absorption, reducing optical coating laser damage threshold and the output power, but the passivation coatings can prevent laser diode wafer material from oxidation, and prevent formation Ga2O3 oxide, reduce the face surface carriers recombination and can improve laser damage threshold and the laser diode output power.
Keywords/Search Tags:laser diode, optical coatings, catastrophic optical mirror damage, laser damage threshold
PDF Full Text Request
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