Study On The Key Technologies Of Online Monitoring System Of Microtarget Assembly

The high-quality microtarget is the basis and guarantee of the Inertial Confinement Fusion, frequently referred as ICF, to carry out the ignition. The position between micro-sphere, which is the key part of the microtarget, and the microtarget has directly effect on the success of the ignition experiment. Microtarget assembly for inertial fusion is being investigated and has gained some achievement by a number of institutions throughout the world. Reports of the online detection of the relative position among components of microtarget and the measurement after the assembly have been rarely found in our country.After the analysis of the structural features, the geometric parameters and the relative position of the components of the assembly, an online monitoring system, which contains two kinds of non-contact measurement system, microscopic image and laser confocal, has been proposed in this paper. The key technologies needed to be solved include: the study on the mixed measurements of microsopic image system and laser confocal system, the design of the structure of the whole online monitoring system, the motion control system and the calibration techniques.According to the space compatibility between our online monitoring system and a micromanipulation system, which are the two parts of the microtarget assembly system, the structural design baesd on the cantilever of online monitoring system has confirmed. The mechanical structure of the whole online system has been manufactured. And most of the commissioning testing and experiments of the online monitoring system has been finished.Considering the measurement requirements of the online monitoring system, the hardware and the software of the motion control system has been designed based on the DSP and the FPGA.Based on the previous work, the laser confocal measurement system, including optical diagram, structure design and the signal processing algorithms has been improved. Analysis of method to reduce the spot size of the laser confocal probe has been done. Considering of the accrual transformation functions, aberrations of the lenses and the practical requirements, the optical path has been improve by using the espherical lenses to focus the measurement spot, which is about 10μm in diameter. The measuring optical path has been folded in the structure design to reduce the volume of the new laser confocal probe. According to the deficiencies of the optical signal processing algorithms for the existing probe, an improved algorithms has been tentatively proposed, whose feasibility has been verified by the actual measurement experiments. According to the requirement and the precision of the measurement, the structure of the microsopic image system and the measurement principle are determined.The mathematical model of the online monitoring system is set up in this paper. The error motions of the motion mechanism have been detected. The uncertainty of the measurement is analyzed according to the error theory.According to the characteristic of the measuring optical path of the new confocal probe and the help of PSD, a new method to adjust the measuring laser of two probes is proposed and the feasibility of this method is verified through the theoretical analysis. The calibration techniques of microscopic image and laser confocal measurement system are creatively developed.