The Study Of Optical Micro-structure Inspection System

The experiential formula of initial structure selection on achromatic dry microscope objective is proposed on the basis of existent optical systems and experiences. According to that, a series of"larger numerical aperture"miniature lens systems for deep-hole inspection are achieved, which can be used in fiber end face Inspection. Their aberrations are well balanced and their structures are simpler than similar systems. Therefore the study conclusion of initial structure selection is proved to be highly effective. In addition, a zoom microstructure inspection system, which consists of dual moved components, is developed to improve detail discernment. It can be utilized independently or dependently. Its zoom range (4:1) is broader than the similar products'. Furthermore,"wide field"tubule optical systems for microstructure endoscope inspection are presented. A series of wide angle/extra wide-angle miniature optical systems are accomplished. They are simpler than endoscope system with similar field and have already been put into production. Finally, freely assembled portable fiber end face inspection continuing zoom endoscope is developed. The relevant experiment is carried out, and the favorable result is attained.Major innovations of this dissertation:Optical design theory study: A quantitative experiential formula of the relationship between system structure and deflection angle on achromatic dry microscope objective is proposed. Moreover, taking the cost of standard spherical surface objective into account, the table of initial structure selection on achromatic dry microscope objective is achieved. They are instructional for achromatic dry microscope objective design. Based on the research fruits, four kinds of"larger numerical aperture"deep hole microstructure inspection miniature optical systems are obtained. They are simpler than similar system. Accordingly the efficiency of initial structure selection study on achromatic dry microscope objective is validated.Optical system design: Two groups of microstructure miniature inspection system are proposed and achieved. The first group is five kinds of"larger numerical aperture"deep hole inspection miniature optical systems, which can be used in fiber...