Structure Design And Characteristics Study Of High-performance Interferometric Micro-nano Optical Waveguide Passive Device

With the rapid growth of modern information quantity,the working performance and integration of photoelectric devices are more and more demanding,and the miniaturization and integration of devices have become the development trend of photonic technology.Traditional optical waveguide devices have high energy consumption,large volume,slow response speed,and micro-nano optical waveguide devices as the basis of micro-nano scale photon technology,its small size,light field constraints,fast response speed,low loss,easy integration,has become one of the research hotspot in the field of micro-nano photonics.In this paper,two kinds of highperformance interferometric micro-nano optical waveguide passive devices are designed and fabricated,and their working principles are studied and discussed in detail.The main contents of this article are described as follows:(1)Theoretical analysis,design,preparation and test of a silicon-based 1 × 8electro-optical optical switch chip.The working principle of the Mach–Zehnder interferometer is analyzed from the performance parameters,switching unit and phase shifter.A silicon-based 1×8 electro-optical optical switch chip is designed according to the working principle of Mach–Zehnder interferometer,its structure and preparation process are explained,and the electrical and optical packaging processes of the device are elaborated in detail.With the help of the external driven multi-channel voltage source,the main indexes of switching speed,insertion loss and crosstalk are tested.The response time is basically less than 10 ns,the average insertion loss is 6d B,and the crosstalk is less than-20 d B.The test results show that the silicon-based optical switch chip has high speed,low insertion loss and low crosstalk.(2)A magnetic field sensor coated with magnetic fluid is designed and experimentally.By optimizing the diameter of the micro-nano fiber Bragg grating.The optimization results show that when the diameter is in the range of 2.889 ～2.997μm,the reflection wavelength offset is within ±1pm/℃.From this calculation,a magnetic field sensor with micro-nano fiber Bragg grating diameter of 2.94μm was prepared and the magnetic field sensing characteristics were studied.The experimental measurement results show that the ultra-low temperature sensitivity of the micro-nano fiber Bragg grating magnetic field sensor with a diameter of 2.94μm is about 0.13pm/℃ when it when the temperature changes in the range of 20～80℃.When the applied magnetic field increases from 0Gs to 221 Gs,the sensor has a Bragg wavelength redshift of about 146 pm,with a temperature crossover sensitivity as low as 0.2Gs /℃.The magnetic field response sensitivity of this thermal stable sensor is0.667pm/Gs,and the linearity is greater than 0.985 at 20℃.