Silicon-based Nanometer Optical Waveguide Cavity Nonlinear Optical Properties And Control

Silicon-based nanometer optical waveguide is in optical information transmission on the sub-wavelength scales, coupling, interaction with the material of low loss waveguided structures, may constitute a light source, function sensitive unit, is the basis of the photoelectric integrated sensor and optical information chip, and silicon on insulator(SOI) of a series of major breakthroughs in silicon material is considered to be ideal platform to build integration photonic devices. However, if the full optical interconnection device is applied to the mass consumer market must be based on a low cost technology. So with a high level of integration of silicon-based photon technology of micro/nano optical device raised a hot wave of academia and industry research.In this paper, the key component-around silicon photonic devices the related characteristics of silicon-based waveguide resonator and its application are studied. The resonator is mainly composed of nanometer waveguide grating, optical waveguide transmission, high quality factor(Q) ring cavity preparation integrated on the same plane. For good performance of high integrated silicon waveguide resonators, the main influencing factors are: high efficiency light import(coupling), waveguide transmission of low loss and high Q cavity various challenges. Based on single mode(TE) nanometer optical waveguide transmission conditions, how to suppress waveguide transmission loss, improve the efficiency of nanometer grating vertical coupling, keep high Q cavity theory analysis; Secondly, the temperature characteristics of waveguide resonator, optical linear characteristics test and analysis, to the nonlinear optical properties and related applications such as all-optical switch has carried on the experimental study. Related research content can be summed up in the following aspects:1. Using FDTD and RSOFT software to analyze the optical transmission characteristics of nano grating, strip waveguide and optical waveguide micro cavity in the nano optical waveguide structure. First,the transmission waveguide is single mode transmission characteristic numerical analysis, the transmission loss of optical waveguide optimization analysis; secondly, based on single-mode optical transmission, then the grating coupling efficiency calculation method, effect on the optical coupling efficiency mainly parameters of grating depth, period and duty ratio to analyze and optimize, and ultimately determine the cycle to 590 nm, duty ratio is 50% of the nano grating structure, transmission nanoscale optical waveguide width of 450 nm, thickness of 220 nm. In the theoretical analysis of micro ring resonant cavity of the main performance parameters based on, focus on the analysis of the mechanism of the effect of the nano waveguide micro cavity and the transmission waveguide coupling coefficient, transmission loss, and the relevant parameters was analyzed by numerical simulation. Finally, the L-Edit software is used to optimize the design of the micro resonator integrated unit.2. Through a micro and nano multi-scale process model, combined with electron beam exposure and deep silicon etching technique, by using dry etching method for the Bosch process cycle, improve the degree of waveguide with the steep side wall, reducing the transmission waveguide loss, overcome the micro nano integrated preparation of proximity effect and hysteresis effect, micro mask membrane effect of the technological difficulties prepared silicon integrated nano grating, transmission optical waveguide, resonant unit a series of different structure of micro resonator structure.3. High Q single micro ring resonator based on, first of all the linear characteristics of the micro- cavity were test and analysis, the transmission loss for 0.532dB/cm and quality factor for 105 high Q value cavity, and the testing of the temperature characteristic of the micro cavity, the resonance wavelength of the linear degree is 54.1pm/ ℃. Followed by study of the silicon based micro ring resonator optical signal control technology, using the single micro cavity structure, through the single beam power control injection mode microcavity optical nonlinear thermal characteristics are analyzed, resonant peaks are red shifted threshold 0.34 nm. In the theoretical analysis optical switch based on to study the thermal nonlinear effect of double beam control injection mode based on microring resonator all-optical switch scheme, through the regulation of optimization at the wavelength corresponding to the optical power realization of extinction than 15 dB and the switch time is micro-second for all-optical switch; followed by analysis of the single microring resonator optical delay characteristics, through the regulation of two adjacent resonant wavelength optical power found probe power metering size and optical delay is proportional to, through the mutual regulation eventually won the 15.4ps and 8.5ps maximum delay.