Research On Logic Rule Control For Piezoelectric Actuators Micro-positioning System

Precision positioning system is sensitive positioning mechanism with higher precision. It is one of key parts of precision machine and precision instrument. With the piezoelectric actuators more application in precision positioning and micro-operation, flexure micro-positioning mechanism driven by the piezoelectric actuators gets wide application. Because of tight structure, smaller bulk, higher distinguish rate, often no heat and easier to be controlled, piezoelectric actuators get better well-round application. But at the same time there exist hysteresis and squirm effect in piezoelectric materials, it is hard to get higher precision because of hysteresis nonlinearity in micro-positioning system. How to overcome hysteresis and squirm effect in piezoelectric actuators has always been one of the important problems. In order to reduce effect of above disadvantage and make characteristic of piezoelectric actuators better, it is necessary to research in-depth in these limitations, display physics essence of hysteresis nonlinearity, build corresponding physics and mathematics model and develop control algorithm. This is beneficial to remove disadvantage effect of hysteresis nonlinearity. This paper mainly studies on dynamic control model of piezoelectric actuators, off-line simulation and on-line experiment on logic rule method and logic rule algorithm in piezoelectric actuators micro-positioning system.Ideals of in piezoelectric actuators micro-positioning system are presented in this paper. Then conceptions, terms in logic rule control, pan-Boolean algebra theory in logic control as basis of logic rule control are introduced in this paper respectively. And constitute of logic control system based on pan-Boolean algebra theory, principle of logic control, characteristic of logic control method and realization flow of logic controller are introduced here too. Logic control request and token of motion control system is presented here. A novel dynamic control model of piezoelectric actuators has been built. Logic rule control algorithm based on error phase plane and logic rule control algorithm based on error phase space are presented on the basis of pan-Boolean algebra theory.Logic control scheme is given for piezoelectric actuators with hysteresis nonlinearity. A novel dynamic control model of piezoelectric actuators with hysteresis nonlinearity is built. Logic rule control algorithm based on pan-Boolean algebra theory is applied in piezoelectric actuators micro-positioning system, off-line simulation is carried on synchronously. Based on above all, combining logic rule control algorithm with classical PID control algorithm, Rule with PI multimode subsection control is presented.Then precision positioning stage control system is presented and realized. A new scheme for flexure driven stage of piezoelectric actuators micro-positioning system is presented here. Its mechanical model is constructed for flexure driven stage, and it is processed by static state analysis and dynamic state analysis. At last firm degree of flexure driven stage is calculated by theory and parameters of elasticity circle are made certain.Experiment system of piezoelectric actuators micro-positioning system is constructed. A novel piezoelectric actuators supply source is developed. Special hardware driven circuit is designed. A series of logic rule software for piezoelectric actuators micro-positioning system is authorized. And experimental results are introduced in logic rule control for piezoelectric actuators micro-positioning system.At last above all productions are applied in the non-probe multi-channel near-field optical microscope. Micro-positioning stage control system for non-probe multi-channel near-field optical microscope is built. The motor and the piezoelectric actuator were adopted to ensure a larger travel range and higher precision in the stage control system. Encoding mask is fit for system in driving and positioning, and matrix encoding measure data are realized.