Research On Measuring System Of Micro-Capsules Assemble

Inertial confinement fusion (ICF) is an effective method to resolve the problem of energy crisis and the government attaches more importance to researches on ICF in the developed country such as the U.S.A, Japan and so on. In the experiments of ICF, targets of good quality are the base and premise of the ignition, so the fabrications, assembly and measurement are very important to ICF experiments. Equipments to assemble targets have been researched interiorly at present, but research about measuring position of parts of targets during assembling and research about measuring location errors of capsules after assembling have not been reported. This paper studies the imaging-measuring method to settle these two measuring problems of ICF targets.Research about measuring location errors of capsules is presented at first. On the basis of analyzing conformation of targets and imaging experiments, a single micro-imaging system is used to measure the location error of capsules with both images of the side and front targets. The mathematical model is deduced, and the experiment setup is carefully calibrated; to avoid fabricating especially calibrating object needed in general calibration algorithms, a calibration method is presented by which the imaging-system is calibrated with gauge and resolution board. Having measured two known targets, the results show that the maximum errors (3σ) are less than 6μm.In thesis, an orthogonal micro-imaging system is used to inspect the assemble process of ICF targets. Except calibrating the imaging-system in experiment setup, the angle between optical axils of two micro-imaging system is measured by use of resolution board and precise rotation stage. The results of experiments show that the maximum error is less than 7μm; therefore this method meets the accuracy requirement of 0.01mm.