| Ultra-high-Q (UHQ) silica microspheres have found research applications in diverse fields ranging from telecommunications to nonlinear optics to biological and chemical sensing. However, despite having quality factors greater than 108, the silica microsphere has not moved to an industrial setting because of several major drawbacks. The most hindering is the manual fabrication technique used that makes tight process control difficult and integration with other optical or electrical components impossible. Despite the strong desire to fabricate an integrated UHQ microresonator on a planar substrate, the highest quality factor achieved for any micro-fabricated planar micro-cavity (at the time of my first publication) was over 4 orders of magnitude lower than for silica microspheres. In this thesis, a process for creating planar micro-cavities with Q factors in excess of 400 million on silicon wafers is demonstrated. The advantage of these planar ultra-high-Q (UHQ) microtoroid resonators is that they successfully overcome the previously mentioned drawbacks of silica microsphere resonators while maintaining nearly identical, if not better, performance characteristics. Additionally, due to the planar nature of these new devices, functionality has been integrated in-situ while maintaining coupling control, and low-threshold lasing. |
