The Study On Efficient Angle Mirror In Planar Waveguide Chip Of Thick Silicon Oxide

Currently the planar lightwave circuit(PLC) based intensive large-scale optical switching devices are dramatically demanded, and silicon oxide waveguide technology is the most mature and most conducive to mass production of PLC integrated products leading to the low cost. Meanwhile, publications show that the optical propagation loss on chip and the waveguide-fiber coupling loss are minimized, as a result, it is taken as one of the most promising technical platform in engineering. Thus, this article systematically analyzes the advantages and promising potential in applications of silica-waveguides, and meanwhile points out its intrinsic drawbacks and the key problems that need to be solved so that the necessity and significance of this work is shown out. In this work, by combining the successful trenching of thin silicon waveguides, the big Goos-Hanchen effect of low refractive index contrast waveguide reflection and the technical properties of etching process of silica-waveguide, we obtain the successful deep trenching of 21 micrometer to realize the total internal reflection of guided-mode. For performance testing, a pair of waveguide corner mirrors(WCMs) is designed to be 1-in 3-out structure having a reflective surface larger than waveguide interface. As a result, in experiments three output guided-mode spots are observed, which is agreeable with the goal in design, and the total insertion loss of device is about 21 dB, so each WCM should share a loss of 11 dB. The establishments in this thesis have found a foundation for continuously optimize the reflection efficiency of this promising device structure and enhance the scientists and engineers confidence to realize the large-scale optical switching device on PLC technology platform. To the best of our knowledge, so similar work and establishments have been reported. Hence, this work achievements will promote the development and applications of silica-PLC large-scale components in the entire field of optical networks and also activate the developments and applications of innovative products for improving optical networks.