| With the development of the micro/nano manufacturing industry,people are striving for more excellence in the packaging technology of micro and nano devices.In the process of adhesive transfer in micro/nano packaging technology,the adhesive transfer system can not only meet the packaging requirements of the micro/nano manufacturing industry,but also ensure the accuracy of the shape parameters of the transferred adhesive.The adhesive transfer system developed by our research group can achieve the transfer of f L-p L level micro-volume adhesive completely,the system can basically meet the packaging requirements of micro and nano devices.In order to make the transfer process of adhesive accurately,it is necessary to measure and monitor the shape parameters of transferred micro-volume adhesive online.In response to the difficulty of online measurement and providing accurate feedback for the shape parameters of f L-p L level micro-volume adhesive using current measurement methods,this article introduces machine vision to online measurement of micro-volume adhesive shape parameters on the existing adhesive transfer system,the method can provide technical support for improving measurement accuracy and efficiency.Firstly,the needle transfer micro adhesive transfer system and its working principle developed by our research group were elaborated.By analyzing the mechanism of adhesive transfer and the spreading mechanism of micro-volume adhesive,the changes in force and energy during the adhesive transfer process were clarified.A mathematical model was established to describe the micro-volume adhesive in the process of adhesive transfer,and the relationship between the shape parameters of the micro-volume adhesive was explored,providing a theoretical basis for the subsequent measurement of the shape parameters of the micro-volume adhesive.Secondly,based on the characteristics of the adhesive transfer system and the morphology of micro-volume adhesive,the design and construction of a measurement platform for the shape parameters of micro-volume adhesive were completed.This platform mainly includes a adhesive transfer system and a visual inspection system,completing the development of the humanmachine interaction interface for the visual inspection system,and achieving functions such as image acquisition,image preprocessing,and machine measurement of micro-volume adhesive.The formula method and curve fitting method were respectively used to obtain the shape parameters of micro-volume adhesive.Through experimental verification,the curve fitting method with manually extracted feature points had an error of 4.2%,which was smaller than the formula method with an error of 6.4%.The experimental results proves that the curve fitting method is more suitable for measuring the shape parameters of micro-volume adhesive.To further improve the measurement accuracy and efficiency of the shape parameters of micro-volume adhesive,an online measurement method for the shape parameters of microvolume adhesive is proposed.By automatically fitting the contour edges of micro-volume adhesive,the fitting curve function is obtained,and on this basis,the shape parameters of microvolume adhesive are obtained.Since the automatic measurement duration of the vision measurement system is less than the time interval of each adhesive transfer,the online measurement of micro-volume adhesive shape parameters is completed by setting the image acquisition interval of the industrial camera to be the same as the adhesive transfer interval.Finally,a single factor experimental analysis was conducted on the adhesive transfer system,and the influence rules of each factor on the adhesive transfer results were obtained.During the continuous transfer of adhesive,50 sets of micro-volume adhesive were measured online using a visual detection system,and the results showed that the online measurement error less than 2.5%.In addition,the spreading process of micro-volume adhesive was detected through a visual detection system,and the relationship curve between the shape parameters of micro-volume adhesive and spreading time was obtained.Eventually,the state prediction during the spreading process of micro-volume adhesive was completed through this time parameter curve.The prediction error of the diameter,height,and contact angle of micro-volume adhesive was less than 3%.The research results in this thesis illustrate to a certain extent that the micro-volume adhesive transfer method and the online measurement method of shape parameters studied in the thesis can realize the precise distribution and real-time detection of f L-p L level adhesive,the method can basically provide a new approach to break through the practical application of micro/nano scale device packaging and integration levels. |
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