| Micro-robots are widely used in many fields,such as minimally invasive surgery,targeted drug delivery,microbiology culture,and micro-manipulation due to its advantages of small size,small inertia,fast response,flexible movement and wide application.Although much progress in the processing method of micro-robots such as photolithography and electrodeposition techniques has been made,the preparation and assembly processes of the existing micro-machining methods are relatively complex and the micro-robots types that can be processed are single.As the work environment of micro-robots in the biomedical field is complex and varied,it is of great significance to develop a programmable flexible micro-machining system.This paper proposed a micro-machining method based on micro-pipe programmed fluid distribution and then built corresponding micro-machining systems which can easily and flexibly process various shapes and sizes of micro-robots.In addition,a micro-robot magnetic drive system was set up to investigate the factors affecting the micro-robot motion rate and its change regulation.Firstly,a micro-machining method based on the micro-tube fluid distribution that contained point processing and line processing was proposed,an experimental system was established,which included micro-machined material filling modules and micro-processing experimental modules.Micro-machining process based on microscopic visual feedback was put forward to determining the basic manufacture flow.Furthermore,the flow model of the fluid in the tip of the tapered microtube was built in the light of the Stokes equation and the continuity equation,meanwhile the flow formula of the microtube tip was derived.Secondly,microfabricated experimental research was conducted using micromachining system.The correspondence between the actual size of the micro-machining space and the microscopic image was determined by microscopic visual dimensioning experiments.The point and line micro-machining methods were studied separately: Line processing experiments showed that the line width of UV polymer decreased with the increase of micro-pipe transverse rate,and increased with the increase of micro-pipe working pressure;Point processing experiments showed that the size of UV polymer dots increased with the increase of microtubule work pressure and air pressure operation time.Subsequently,UV polymer shape influence experiments were operated to obtain the effect of trimethoxy(1H,1H,2H,2H-heptadecafluorodecyl)silane mass fraction on the contact angle of the substrate.Thirdly,the magnetic drive system was designed,built,and verified.The structure of coil system was designed based on the Helmholtz coil principle,then analyzed the two types of magnetic field generation methods and combined the COMSOL software to simulate the magnetic field distribution.Moreover,the magnetic drive system was established,which included test bench,microscopic vision module,and motion control module,afterwards used the TESLA meter to verify the magnetic field generated by the magnetic drive system.Finally,magnetic drive experimental study was carried out on the magnetic drive system,and the oscillating magnetic field micro-robot and gradient magnetic field micro-robot were prepared respectively.The regular experimental study of gradient magnetic field micro-robots and vibrating magnetic field micro-robots was conducted to obtain the relative parameters which influence the motion rate of micro-robots and their synergistic effects. |