| Piezoelectric ceramic materials are widely used in various fields such as aerospace,biomedicine,vibration engineering,and precision positioning,particularly playing a crucial role in micro-displacement motion applications.This thesis aims to explore the application of piezoelectric ceramic materials in micro-displacement motion platforms and design a piezoelectric ceramic power amplifier with low harmonic distortion,high output voltage,and excellent stability,in conjunction with GaN(Gallium Nitride)wide bandgap semiconductor device research.This thesis begins with an in-depth study and analysis of piezoelectric ceramic materials,thoroughly understanding their performance characteristics and working principles.The research findings indicate significant application prospects of piezoelectric ceramic materials in the field of micro-displacement motion.To enhance their performance in this field,the design principles of the piezoelectric ceramic power amplifier are further analyzed.Addressing the performance deficiencies of the piezoelectric ceramic power amplifier in micro-displacement motion applications,key technologies of the switch-mode piezoelectric ceramic power amplifier are analyzed.This includes the issues of harmonic distortion in piezoelectric ceramics and crosstalk between switching devices.In-depth research on the generation process and causes of harmonics is conducted,exploring harmonic suppression techniques and focusing on filter design technology.For the crosstalk problem between switching devices,the mechanism of crosstalk generation during the operation of switching devices is analyzed,and methods for crosstalk suppression based on this principle are investigated.The design specifications and overall design plan of this project are determined.Detailed analysis and design of the main circuitry of the power amplifier are conducted,and the main circuit and harmonic characteristics are verified through simulations.The half-bridge topology is selected as the design scheme for the main circuit based on theoretical analysis and simulation results.During the simulation process,modeling and analysis of crosstalk are performed to further study crosstalk suppression methods.Based on the overall design plan,the hardware and software of the piezoelectric ceramic power amplifier system are designed.The hardware design includes the core GaN main circuit topology and its related driving circuit design,control system circuit design,and output monitoring circuit design.The software part involves signal data acquisition program design,threshold monitoring program design,and Sinusoidal Pulse Width Modulation(SPWM)program design using a Programmable Logic Controller(FPGA).Through the proposed research and the construction of the overall system,experimental verification is conducted.The experimental results demonstrate that the piezoelectric ceramic power amplifier performs well in terms of output harmonic distortion and stability under simulated loads.Specifically,with a simulated load of 5u F and an input voltage range of 0-10 V,the power amplifier achieves an output voltage range of 0-500 V and a frequency response range of 0-1kHz,meeting the design requirements with harmonic distortion below 4%. |