Design And Analysis Of Precision Tilt Stage Based On Anti-symmetric Stiffness Spatial Flexible Mechanism

The precision tilt stage is one of the key devices in high-tech fields such as nanolithography,laser weapons,and space communications,thanks to its precise scanning,tracking,and pointing functions.Especially with the development trend of precision and miniaturization of modern machinery,the tilt stage with high compactness and large stroke has become a research hotspot.The tilt stage manufactured by sub-module manufacturing and overall assembly has problems such as large volume,assembly error and vibration,which cannot meet the increasingly strict requirements of compact and integrated applications.Additive manufacturing technology has been widely applied in many fields through breakthroughs.In this paper,a precision tilt table with high compactness,large stroke and excellent additive process based on anti-symmetric stiffness space flexible mechanism is designed.We have carried out research on the structural design,modeling analysis,simulation and testing of the tilt stage.The main research contents include:Firstly,aiming at manufacturing a spatial flexible tilt stage with additive materials,a new set of anti-symmetric stiffness spatial flexible mechanisms was designed,which can simultaneously amplify displacement and guide motion.A 1-DOF tilt stage was innovatively designed.Simulation and experimental results show that the tilt stage has large stroke,high compactness,high resonance frequency,and good additive manufacturability.The designed tilt stage validates the advantages of flexible mechanisms in the design of spatial tilt motion schemes,providing a foundation for the subsequent optimization design and analysis of dual axis tilt stages.Secondly,to meet the requirements of biaxial tilt motion such as surface scanning,a single drive push-pull yaw motion scheme is adopted to optimize the design of the 2-DOF tilt stage.The main deformation mechanism of the tilt stage adopts a distributed flexible mechanism design.Symmetrically distributed displacement amplification modules can effectively amplify the output displacement of piezoelectric ceramic actuators.The displacement deformation module has dual functions of secondary displacement amplification and spatial deflection guidance.The design scheme using distributed spatial flexible mechanisms can adapt to additive manufacturing processes,and has the structural advantage of high compactness.Then,considering the form of spatial motion,we calculated the equivalent stiffness and equivalent parasitic stiffness of the displacement deformation module in each direction,and quantitatively analyzed the mechanical performance of the displacement deformation module.By analyzing the relationship between the forces and deformations of each module,a static model of the tilt stage based on the Castigliano’s second theorem is established.Meanwhile,a dynamic analysis model is established using the Lagrange method.The mechanical analysis process provides a theoretical basis for the performance analysis and testing of the tilt stage.Finally,finite element software is used to analyze the performance of displacement deformation modules and tilt stages.Moreover,the analysis results also verified the accuracy of the theoretical model.Different measurement systems have been built for different mechanical performance testing requirements of the tilt stage,which manufactured by additive manufacturing process.Through experiments,we further analyze the mechanical properties of a parallel biaxial tilt stage based on distributed spatial flexible mechanisms.In this paper,a novel structure of a 1-DOF tilt stage based on anti-symmetric stiffness spatial flexible mechanisms is proposed.The mechanical performance was analyzed and verified through simulation and experiments.Subsequently,a 2-DOF tilt stage was innovatively designed.The statics and dynamics models were established using the Castigliano’s second theorem and the Lagrange method.We have processed the platform prototype using an additive manufacturing process.The mechanical performance of the tilt stage is analyzed through finite element simulation software and corresponding experimental systems.This paper has broad reference significance for topics such as distributed flexible mechanisms,precision platforms for additive manufacturing,and mechanical modeling of tilt stages.