| Semiconductor manufacturing industry has become a key factor restricting the high technology development in China.All semiconductor manufacturing need a cleanroom to process wafers,cleanroom facility monitor and control system is very critical to support high quality manufacturing,such as temperature and humility will directly impact the process quality,meanwhile all of the process gas including hazard gas need well control to ensure safety to the working environment.Currently the facility control in most of the manufacturing Fab already improved with high integration and intelligent control,but there are still some of areas need improve,such as can’t cover all of the area,for the critical process area such as Lithography and Metrology area still need periodicity manually measurement as an assistant,also didn’t cover all of the gas hazard specially can’t timely response to new process change area.This thesis designs a new monitoring system in cleanroom to improve the monitoring quality.Modularization and phantomization are adopted in the scheme design.It uses wireless communication as the main communication mode,supplemented by wired communication,monitoring of temperature and humidity,gas concentration,air particles and other parameters in the Fab environment.It provides man-machine interface unit,emergency alarm unit and emergency communication unit.The system mainly focuses on the use of domestic manufactured equipment and components to break the blockade of foreign technology.This thesis analyzes the problems and requirement of the existing monitoring system,divided the new system into three parts: field monitoring unit,information transmission unit and upstream monitoring system unit.It analyzes the communication requirements between the field monitoring unit and the upstream monitoring system,choose to use both the Ethernet wired communication and wireless communication.ZigBee wireless communication based monitoring sensor are preferred to be used in system which suite to the requirement of dynamic Fab location monitoring.STM32F103 controller is selected as the main system controller.ZigBee module、WIFI module and RF433 module bring into system for wireless unit communication.Also there are several of the hardware circuit designed to support the overall system working,such as serial port expansion circuit,human-computer interaction interface,darkroom emergency communication,I/O control...,etc.In the last of this thesis,it finished software design and electrical function test on the clean room monitoring system,for the software programing,according to different functional units of the system,it is designed into different subroutines to facilitate system management.It focuses on the functional unit test and the whole system test.By comparing the system with the original system,it can be seen that the detection results of the new system are consistent with the original system.Through long-term operation,it can be judged that each functional unit of the system operates well and performance is stable,which can basically meet the requirements of usage. |
