Design Optimization And Magnetic Field Simulation Of Multifunctional Magnetron Ion Composite Coating Machine

Vacuum magnetron sputtering technology and vacuum ion coating technology,as the two most common coating technologies in physical vapor deposition,are widely used in the surface treatment of tools,abrasiades and some friction and wear parts.Now,the domestic coating machine has been basically able to achieve complete self-production,some of the domestic equipment manufacturers can design and produce multi-arc ion coating machine and magnetron sputtering coating machine performance even do not import brands,but whether it is ion plating or magnetron sputtering,its own there are some inescapable shortcomings,such as low utilization rate of magnetron sputtering coating target material,There are some problems such as large residual internal stress in multiarc ion plating film.Many scholars have put forward some measures to improve these problems,but it is difficult to solve them fundamentally.However,if these two devices are integrated,magnifying the common advantages to make up for a single deficiency may be a good solution.Therefore,it is of great significance to design a multifunctional magnetic-controlled ion composite coating machine.The main work of this topic is on the basis of the existing magnetron sputtering coater and multi-arc ion coater,the two will be fused to produce a magnetron ion composite coater.The whole and key parts of the multifunctional magnetron ion composite coating machine were designed with the help of Solidworks,the finite element analysis software ANSYS Workbench was used for statics analysis and modal analysis of the whole model,and the magnetic field analysis software Comsol was used to simulate and optimize the magnetic field of the magnetron sputtering part.Finally complete the overall structure of the framework.The main research conclusions are as follows:（1）With the help of 3D modeling software,the overall structure and key components of the magnetic-controlled ion composite coating machine were designed and modeled,mainly including the structure design of the regular octagonal prismatic vacuum cavity,the calculation and selection of the vacuum pump group,the selection of the metal target and the design optimization of the transmission system,heating system and cooling system.（2）With the help of finite element analysis software to composite coating machine octagonal vacuum chamber static analysis,and analysis of the pressure distribution and deformation of the octagonal prismatic vacuum chamber installed on the wall surface of different quality,different quantity of the target,obtained the target mass installed in more than how much,the vacuum cavity shape variable beyond the normal use of the range.Then,through the thermal and mechanical coupling analysis of the vacuum cavity after the installation of the target material,it is verified that the shape variable and the maximum equivalent stress of the vacuum cavity under the condition of high temperature and high vacuum are within the allowable range.（3）The constrained modal analysis of the vacuum cavity of the magnetic-controlled ion composite coating machine was carried out.By studying and analyzing the parameters of the natural vibration shapes and frequencies of the first 10 orders,it can be seen that when the vibration frequencies of the first five orders are low,the deformation of the vacuum cavity mainly occurs at the top and bottom,while the vibration frequencies of the last five orders increase,and the deformation of the vacuum cavity is mainly concentrated on the x axis and y axis wall.It indicates that the stiffness of these regions is weak and can be enhanced.The excitation frequency of the vacuum motor and the spindle motor is checked.It can be seen that the excitation frequency of the motor in the magnetic-controlled ion composite coating machine is not on the modal frequency and the difference is large,which can effectively avoid resonance.（4）The magnetic field of the magnetron sputtering target was simulated by magnetic field analysis software.The magnetic field distribution on the surface of the target was changed by changing the height of the magnet inside and outside the target,the diameter of the magnet inside and outside the target,the presence or absence of magnetic sheets,and the length and thickness of the magnetic sheets.Through the simulation results,the structural parameters of the main magnetic circuit of the rectangular magnetron sputtering target under the target size studied in this subject are determined:When the inner magnet height h₁=12mm,diameter D₁=20mm,outer magnet height h₂=16mm,diameter D₂=10mm,and the magnetic sheet is placed symmetrically between the inner and outer magnets,the length of the magnetic sheet L=6mm,and the thickness of the magnetic sheet d=2mm,the area of uniform distribution of magnetic induction intensity on the target surface is the largest and most flat.The maximum magnetic induction intensity is about 37m T,the utilization rate of rectangular magnetron sputtering target is obviously improved,and the quality of plating parts is also greatly improved.