Structure And Properties Of SiC/Cu Composite Films Prepared By Magnetron Sputtering

SiC/Cu composite films and microporous SiC/Cu composite films were prepared by magnetron sputtering technology combined with high temperature annealing process under different sputtering parameters.The microstructure,hydrophobic performance,anti-corrosion performance,friction and wear performance and optical performance of the composite films were tested and analyzed by modern characterization methods.The internal relationship between the microstructure of the composite films and its related properties was explored,and the preparation process of SiC/Cu composite films with excellent properties deposited by magnetron sputtering technology was studied.The main research contents and results are as follows.（1）SiC/Cu composite films were prepared by magnetron sputtering technology.The effects of different SiC sputtering power on the microstructure,morphology,hydrophobicity,corrosion resistance,friction and wear properties and optical properties of SiC/Cu composite films were studied.The results show that when the SiC sputtering power is 250 W,the water contact angle of SiC/Cu composite films is as high as 132.3°,the corrosion current density is as low as 3.81×10^-8A·cm^-2,which is three orders of magnitude lower than that of pure Cu substrate.The average friction coefficient of the composite films is as low as 0.08,and the wear rate is about 6.39×10^-5mm³/Nm.The reason for the analysis is that under high power,the hydrocarbon content,surface roughness,and graphite-like structure in the film with papillae-structured increase,resulting in a decrease in surface energy and polarization strength.Meanwhile,more nano-SiC particles are uniformly dispersed in the films to reduce the porosity and effectively prevent the diffusion of Cl^-ions.In addition,the tightly bonded nanocomposite structure in the films reduces the shedding of SiC particles during the friction and wear process,and the increased degree of graphitization is beneficial to reduce the friction coefficient of the films.（2）SiC/Cu₃N composite films were prepared by magnetron sputtering technology.The microporous SiC/Cu composite films were obtained by annealing at 500℃.The effects of different gas flow ratio r（r=N₂/[N₂+CH₄+Ar]）on the structure,morphology and optical properties of microporous SiC/Cu composite films were studied.The results show that the composite films exhibit semiconductor properties,and the optical band gap is 0.92 e V–1.29 e V.The reason is that with the increase of r,the Cu grain size and the relative content of sp²–C bonds in the films first increase and then decrease,and the optical band gap shows a trend of decreasing first and then increasing.When r=1/4,the particle size on the surface of the composite films is uniform,the pore is uniform,and the structure is stable.At the same time,the crystallization of Cu is better,the grain size is larger,and the composite films has a smaller optical band gap.