Magnetron Sputtering Preparation Process Of MoS₂ Composite Coating And Its Wear-corrosion Behavio

Commonly,doping Ti or Cr can improve the compactness,oxidation resistance,mechanical properties and tribological properties of MoS₂ composite coatings.C-based materials have excellent wear resistance in high-humidity environments.Therefore,Ti and Cr were selected as metal dopants for MoS₂ composite coatings,and C was selected as nonmetallic dopants for MoS₂ composite coatings.This thesis aims to preserve the positive effect of single element doping on MoS₂-based coatings,to obtain MoS₂ composite coatings by binary（Ti and Cr）and ternary（Ti,Cr and C）doping of MoS₂,and to study composite coatings tribological and corrosion properties.In this thesis,pure MoS₂,MoS₂-TiCr,and MoS₂-TiCrC composite coatings were fabricated by magnetron sputtering.And the EDS,XPS,XRD,Raman spectroscopy,SEM,white light interference,nano-indentation,potentiodynamic polarization,and EIS electrochemical impedance spectroscopy were used to investigate the chemical composition,compound composition,phase structure,micromorphology,surface roughness,mechanical properties,and corrosion resistance of each coating.The friction and wear tests of each coating were carried out in the atmosphere,artificial sea fog and artificial seawater environment to explore the friction and wear behavior of the coating.The outcomes reveal that doping Ti and Cr can significantly reduce the amount of MoS₂ for MoS₂-TiCr composite coatings.And with the increase of Ti and Cr doping content,the crystallinity of MoS₂-TiCr composite coating decreases and the grains are refined.The MoS₂-TiCr composite coating with higher Ti and Cr content has a denser microstructure,higher hardness,and lower corrosion rate,but is more prone to corrosion.In sea fog environments,the friction coefficient of each MoS₂-TiCr composite coating is the highest,while in seawater environments,the friction coefficient of each MoS₂-TiCr composite coating is the lowest.In sea fog and seawater,the wear rate of each MoS₂-TiCr composite coating is higher than that in atmospheric environments.MoS₂-TiCr composite coatings with high Ti and Cr contents exhibit significant corrosion peeling and delamination behavior in seawater environments.The MoS₂-TiCr composite coating with 4.2 at.%Ti and 5.1 at.%Cr has the lowest wear rate in all environments.For MoS₂-TiCrC composite coatings,with the increase of C doping content,the crystallinity of the composite coating decreases,and the microstructure of the coating is denser,thinner,harder,and has better corrosion resistance.Compared to those in atmospheric and sea fog environments,MoS₂-TiCrC composite coatings can achieve lower wear rates in seawater environments.And the wear rate of MoS₂-TiCrC composite coating with 43.6 at%C in seawater environment is only 0.27×10^-6 mm³/N·m.Specifically,MoS₂-TiCr composite coatings can obtain better tribological properties in atmospheric environments,while MoS₂-TiCrC composite coatings can exhibit better tribological behavior in higher humidity sea fog or seawater environments.