Research On Key Technology Of Single Mechanical And Mechano-Chemical Synergistic Micro-Grinding Of Fused Silica

With the rapid development of science and technology,the demand for micro-parts in high-tech fields such as information technology,biomedicine and aerospace has increased dramatically.At the same time,the requirements for machining accuracy and surface quality of micro-parts in various fields are also increasing.In the processing of micro-parts,micro-grinding technology has great advantages over traditional processing technology.At present,micro-grinding technology has been able to produce micro-parts with complex structures.However,since the micro-grinding technology is still in the development stage,there are some problems such as serious edge chipping,poor surface quality and easy wear of micro grinding tools.Therefore,this paper first studies the single mechanical micro-grinding process and wear mechanism of CVD diamond micro-grinding tool.In view of the shortcomings of single mechanical processing,the mechanochemical micro-grinding(MCMG)process was proposed,and the MCMG micro-grinding tool was developed,and the formula and process parameters were optimized.Finally,combined with the advantages of efficient removal of single mechanical action and ultra-precision machining of mechanochemical action,the single mechanical and mechanochemical synergistic micro-grinding technology(MMCMG)was further proposed,and the corresponding composite abrasive microgrinding tool was developed.At the same time,the grinding mechanism is studied.The specific work of this paper is as follows:(1)Taking spindle speed,feed speed,grinding depth and particle size as variables,the single factor experiment of CVD diamond micro-grinding tool for fused silica was designed.The variation of surface roughness,surface morphology and average edge chipping width under different process parameters were obtained.At the same time,the micro-grinding tools were characterized and analyzed to clarify the characteristics of micro-grinding tools with different particle sizes,and the wear morphology of microgrinding tools were observed,and the wear mechanism of CVD diamond microgrinding tools was studied and analyzed.(2)According to the physical and chemical properties of fused silica,the components of MCMG micro-grinding tools were selected.Subsequently,MCMG micro-grinding tools with different formulations were designed by orthogonal test method,and hot pressing mold were designed.The preparation process of microgrinding tools was formulated,and the modification method of micro-grinding tools was clarified.(3)Grinding experiment was carried out on fused silica using the prepared MCMG micro-grinding tools with different formulations.With surface roughness and material removal rate as evaluation indexes,the effects of various components in the microgrinding tools on the grinding performance were analyzed,and the optimal formulation was obtained.At the same time,the optimization experiment of process parameters was carried out for the MCMG micro-grinding tool after formula optimization,and the effects of spindle speed,feed speed,grinding depth and other factors on surface roughness were studied,and the optimal process parameters were obtained.(4)The composite micro-grinding tool of diamond abrasive and cerium oxide abrasive delamination was developed.For single mechanical action,the material removal mechanism was analyzed by single abrasive scratch test.For the mechanochemical effect,laser confocal Raman microscope and X-ray diffractometer were used to detect the grinding surface and debris,and the solid phase chemical reaction in the grinding process was analyzed to reveal the material removal mechanism of mechanochemical action.Finally,the composite abrasive micro-grinding tool was used to carry out the grinding experiment to clarify the material removal process.