Research On Preparation And Demolding Of Microstructure Abrasive Tool By Electrostatic Spray Deposition

At present,the application of microstructure components in advanced manufacturing fields such as optical lenses,integrated chips is more and more widely used.When processing microstructures ultra-precision turning and ultra-precision grinding will produce defects such as collapse,scratches,and punching heads is difficult to enter the size of tiny trenches.Electrostatic spray technology can carry small particles uniformly deposited into a slight slit and have structural adaptability.According to the characteristics of electrostatic spray this study prepared microstructure abrasives,and proposed a method for vertical demolding from the abrasives non-contact surface,and theoretical analysis and experimental exploration of electrostatic spray preparation microstructure abrasives and abrasives demolding were carried out.The main research content includes the following aspects:(1)The principle of electrostatic spray deposition and the theory of microstructures demolding were analyzed and studied.The process of electrostatic spray deposition and charged method were analyzed,and jet-atomization and fog dripping deposition were studied.The theory of bonding and surface resilient contact model were described,and the composition of the demolding force was analyzed from surface adhesion,friction and contact stress,depended on the binding characteristics of the microstructures and the abrasives.(2)The devices of moving,electrostatic spray deposition and demolding were designed and built.Aerotech linear motor,HIWIN torque motor and servo motor module were used in the axis,and the wirings of the axis were connected in the electric control box,and the motion performances were debugged.The abrasives preparation and demolding were designed and built on the moving device according to the process plan.(3)The experimental materials were prepared and the effect of different additives were explored and microstructure abrasives were deposited.The photosensitive resin,Tween-80,dimethicone or kerosene,diamond and other materials were mixed into electrostatic solution,and the effect of kerosene and silicone oil on electrostatic solution and deposition effect were compared.The effects of exercise speed,application voltage and motion trajectory on abrasive non-contact surfaces were explored.(4)The effects of external release agent and internal release agent were explored.The comparison of vertical demolding and horizontal demolding was carried out from three aspects of regarding the demolding experiments,the numbers of demolding and fit analysis.The vertical demolding mode was optimized from the diameter,number,and connection depth of the screw,and resin abrasives of the deep width ratio 1,1/2,1/4 were successfully demolded in three screws with a diameter of 1.4 mm and connection depth of 3 mm,and the demolding effect was good that the abrasive height difference was 5.37%,the width difference was 1.19%.The polishing effect of the abrasives on plates and microstructures was verified.