Research On The Structure Of Noble Metal Doped Diamond-like Carbon Film And Their Infrared Antireflection Performance

With the development of infrared optical devices,people have increasingly higher requirements for infrared anti-reflection protective films.In order to overcome the problem that the multi-layer infrared anti-reflection protective film is not strong enough to withstand the environment,more and more single-layer infrared anti-reflection protective films have been studied.Diamond-Like Carbon(DLC)film has received more attention.However,due to the high internal stress of the Diamond-Like Carbon film and the existence of high infrared absorption problems,the application is limited.Based on this situation,this article uses a pulsed plasma arc excitation source system to prepare Diamond-Like Carbon films doped with copper and silver by designing a cathode metal graphite composite target,and test its effect on infrared anti-reflection protection.The main work content is as follows:(1)Different targets were used to prepare Cu-DLC film with a copper content of 0.07% to1.56%,and measure the thickness with a step meter;XPS,Raman Spectra,and TEM were used to characterize the Diamond-Like Carbon composition,structure,and micro-morphology;FTIR was used to analyze the sample’s infrared transmittance;electrochemical workstation was used to investigate the corrosion resistance of samples;scratch tester was used to characterize the toughness of film samples.Among them,the Cu-DLC film with a copper content of 1.56% has the highest infrared transmittance,the strongest corrosion resistance,and the highest toughness;(2)Different targets were used to prepare Ag-DLC film with silver content of 0.06% to2.60%,and measure the thickness with a step meter;XPS,Raman Spectra,and TEM were used to characterize the Diamond-Like Carbon composition,structure,and micro-morphology;FTIR was used to analyze the sample’s infrared transmittance;electrochemical workstation was used to investigate the corrosion resistance of samples;scratch tester was used to characterize the toughness of film samples.Among them,the Ag-DLC film with a silver content of 2.60% has the highest infrared transmittance,the strongest corrosion resistance,and low toughness;(3)Choose the film material with the best performance,to design and prepare Ag-DLC,Cu-DLC and Cu-DLC/Ag-DLC double-layer Diamond-Like Carbon infrared anti-reflection protective film based on germanium.FTIR was used to analyze the infrared transmittance of the sample;AFM was used to characterize the surface morphology of the sample;the electrochemical workstation was used to investigate the corrosion resistance of the sample;the scratch tester was used to characterize the toughness of the film sample;the friction and wear tester was used to characterize the wear resistance of the film.Among them,Cu-DLC/Ag-DLC double-layer Diamond-Like Carbon infrared antireflection protective film has the best infrared antire-flection effect,Germanium sheet infrared window transmittance increased from 46% to 55%,the lowest surface roughness,high corrosion resistance and good toughness...