Study On The Preparation And Properties Of Diamond-like Carbon Films System By RF Magnetron Sputtering

Diamond-like carbon (DLC) film is an amorphous carbon film that exhibits a series of excellent properties such as high hardness, good chemical inertness, high thermal conductivity, good transmittance in infrared and low wear coefficient. Compared with diamond film, DLC film has lower deposition temperature, larger deposition scale and smoother surface. It can be used as a new IR antirefiective and protective material. Researches of this paper concentrate mostly on the preparation, structure and infrared transmission of sputtered α-C films and sputtered α-C: H films. The main research works and results are as follows:Anti-reflection film systems containing DLC are designed on Si substrates and ZnS substrates, and deviation of the film system's structure is analyzed. The designed results show that the film systems own good transmission on Si and ZnS substrate.Sputtered α-C films and sputtered α-C: H films have been prepared using RF magnetron sputtering apparatus on Si (111) substrates in order to research the influences of the main experiment parameters such as RF power, gas flow, vacuum gas pressure and substrate temperature on the film deposition rate respectively. The investigations show that the deposition rate increases with the increasing of sputtering power, and initially increases and then decreases with the increasing of sputtering pressure, but is insensitive to the substrate temperature in the preparation of the sputtered α-C films. The investigation shows that the deposition rate increases with the increasing of sputtering power, CH4 gas flow and vacuum gas pressure, but initially increases and then decreases with the increasing of substrate temperature in the preparation of the sputtered α-C: H films.AFM analyses show that the RMS rough increases with the increasing of sputtering power. The surface of the sputtered α-C: H film is smoother than the sputtered α-C film. Raman analyses show that sputtered α-C films and sputtered α-C: H films both contain sp~3 and sp~2 bonds. XRD results show that deposited DLC films are amorphous.FTIR transmission spectrum results confirm the average transmittance at a wavelength of 3～5μm of Si coated with one layer of sputtered α-C: H films on two...