Research On Preparation Process Of Chalcogenide Glass Film Optical Waveguide

In recent years,with the deepening of optical waveguide research and the preparation of more excellent optical waveguide devices,optical waveguide preparation technology has received more and more attention and attention.Chalcogenide glass is an inorganic non-oxide glass material based on sulfur elements.It has high refractive index,high nonlinear coefficient,and good infrared transmittance and other characteristics.The thin film optical waveguide prepared based on sulfur glass has a good domain effect on the light limit,easy integration,low transmission loss,and stable performance.It also has excellent light transmittance performance and strong nonlinearity in the near-infrared optical communication and mid-infrared region.The specific work of this paper is as follows:First,we use the laboratory instruments and equipment to make Ge₂₈Sb₁₂Se₆₀chalcogenide films in this paper.At the same time,the spectrometer was used to measure the transmittance spectrum of the sulfur glass film before and after irradiation.And the refractive index,optical band gap and the changes of the film before and after irradiation were calculated,so as to obtain the main photoinduced phenomenon.The silver doped Ge₂₈Sb₁₂Se₆₀chalcogenide films in this paper were deposited on a glass substrate by the co-evaporation technique.Then the continuous laser with different powers was used to scan the material glass at the same speed,and the photobleaching effect were observed using optical microscopy.The effects of different Ag-doped concentrations,different laser power and laser power density on the photobleaching effect of thin films were also investigated.Then,the structure of the optical waveguide of the embedded sulfur glass film was simulated using beam propagation method.The influence of different waveguide widths on the internal structure mode of the embedded sulfur glass film is studied,and the change of the refractive index of the optical waveguide in the TE and TM are observed.Also,the trend of the effective refractive index with the waveguide thickness is discovered.The film thickness range and the optimal film thickness of the optical waveguide are summarized.Finally,the optical waveguide with structural defects at the edge is designed,and we use the finite-difference time-domain to simulate and observe whether the presence of defects can affect the light transmission in the optical waveguide.The results showed that the higher the silver-doped concentration,the faster the photobleaching phenomenon for the（1.42×10⁴W/cm²）high power density scanning.However,for the low power density irradiation（1.27 W/cm²）,the photobleaching effect saturates regardless of silver concentration.Therefore,silver doping can speed up the photobleaching of Ge₂₈Sb₁₂Se₆₀film only under high-power laser irradiation.However,while silver doping helps to speed up the photobleaching effect,it also increases the risk of film damage.With the change of the thickness and width of the waveguide,the waveguide mode and the effective refractive index will change to different degrees with beam propagation method.