Surface Plasmon Based Vacuum Nano-channel Integrated Infrared Enhanced Absorption Structure

Micro-vacuum electronic devices are micro-nano vacuum devices based on the principle of vacuum electronic devices and processed by microelectronics technology.ability to interfere.Compared with traditional vacuum electronic devices,the nano-gap in micro-vacuum electronic devices reduces the distance of electrons in the transmission process and reduces the operating voltage.In addition,specific metal nanostructures can excite surface plasmon(Surface Plasmon),the mechanism of which is that the external electromagnetic field and the free electrons on the metal surface are coupled to each other,causing electromagnetic oscillations,forming a local field enhancement effect.This thesis combines surface plasmon-enhanced absorption with field electron emission,and the local field enhancement effect caused by surface plasmon is applied to the cathode structure to improve the field emission performance of microelectronic devices.Through simulation and experiments,it is preliminarily proved that the surface plasmon enhanced absorption can affect the field emission current after using illumination.The main contents of this article include:(1)The computer simulation was carried out by CST software,and the influence of various parameters in the metal nanostructure and the structure size on the field emission performance was analyzed.The influence of near-infrared frequency electromagnetic waves on the electric field distribution,resonance frequency,and surface plasmon enhanced absorption effect in the micro-nano structure was analyzed,and the field emission cathode structure suitable for surface plasmon-enhanced emission was optimized.Simulation and analysis of infrared light incident on the surface of the device,the emission edge of the cathode produce field enhancement,and its influence on the emission current.(2)The preparation and characterization methods of micro-vacuum electronic devices are introduced.Based on the simulation results,the periodic structure of the integrated nano-vacuum channel was fabricated,the fabrication process of the periodic structure was designed,and the fabricated cathode structure was analyzed and characterized.(3)Field emission DC tests were performed on the prepared nano-vacuum channel samples under different environmental conditions,and the experimental test results were analyzed.The prepared nano-vacuum channel sample was analyzed by infrared spectrum to test its absorption rate,and the field emission test was performed when the nanovacuum channel structure was irradiated by infrared signals,and the experimental test results were analyzed.The test results show that the nano-cathode structure with a tip has a lower opening field,but the stability and reliability are poor,and the surface morphology may be damaged when the external bias voltage is too large;the nano-vacuum channel structure is irradiated by infrared signals,its field emission characteristics have a certain degree of influence.