Design And Construction Of Integrated Test System For Semiconductor's Variable Temperature Hall And Photocurrent Spectroscopy

In the field of semiconductor science,the investigation on the optoelectronic properties of materials and devices has been more and more important.How to measure semiconductor materials or devices with high precision and efficiency is also a longterm research topic.Generally,the electrical measurement methods for semiconductor include variable temperature I-V characteristic test and Van der Pauw test;and the photoelectric characteristic measurement is commonly characterized by dark current and photocurrent spectrum.According to the needs of practical application testing,this paper designs and builds a set of solutions for photoelectric characteristics testing of semiconductor materials and devices,that is,semiconductor variable temperature Hall and photocurrent spectrum integrated test system.The system consists of three parts:Variable temperature IV characteristic test system,Van der Pauw test system and variable temperature photocurrent spectrum test system.The main contents of this paper are as follows:(1)The hardware part of the variable temperature I-V characteristic test system is composed of Keithley 2400 digital source meter and Lake Shore Model 325 temperature controller.The software program designs the user interface module,the instrument driver module,the data processing and storage module.Through the abovementioned modules,the computer can automatically realize the control of the hardware system of variable temperature I-V characteristic test and the collection and processing of data.(2)The hardware part of the Van der Pauw method test system is composed of multiple digital source meters,Keithley 7065 Hall card,Dongfang Chenjing P9060 magnet power supply,and Lake Shore Model 325 temperature controller.Besides,the digital source meters include Keithley 6221 current source,Keithley 2182 A nanovoltmeter,Keithley 7001 switch selector.The software program part respectively designs the Van der Pauw method resistance measurement system,the variable magnetic Van der Pauw method test system and the variable temperature and variable magnetic Van der Pauw test system.We writed the user interface module,instrument driver module and data analysis and processing for the above-mentioned test system Module.Through the above-mentioned modules,the computer can realize the control of the Van der Pauw method test hardware system and the collection and processing of data.(3)The hardware part of the variable temperature photocurrent spectrum test system consists of Keithley 2400 digital source meter,Lake Shore Model 325 temperature controller and Bruker VERTEX 80 v Fourier infrared spectrometer.The software program part designs the photocurrent test system and the variable temperature photocurrent test system respectively,and writed the user interface module,the instrument drive module and the data analysis and processing module for the abovementioned test system.Through the above-mentioned modules,the computer can realize the controls of the variable temperature photocurrent spectrum test hardware system and the data collection and processing.(4)In this paper,the stability and accuracy of the above-mentioned systems was verified by using tested materials suitable for the above-mentioned systems,and the experimental results are analyzed.