Study On Performance Optimization Of Liquid Crystal On Silicon Chip Devices

Liquid crystal on silicon(LCOS)chip is a key device in the field of modern optics,such as real-time optical information processing,adaptive optics and optical computing.It plays an important role in the development of modern optical technology.Because LCOS supports flex-Grid,it has become the main stream technical scheme to implement WSS module.LCOS based space light modulator works by using the electronic birefringence effect of liquid crystal.It is a kind of light modulator which can adjust the phase of incident light in real time and dynamically without changing the amplitude of light beam.It is widely used in photoelectric mixed information processing system.Compared with the traditional liqiud crystal display,LCOS device has the advantages of higher integration,optical efficiency,resolution and so on,and has a broader application prospect.In this thesis,the high resolution reflection liquid crystal on silicon chip as the research object,the research content includes the liquid crystal on silicon chip working principle and structure principle,phase shape test scheme design,efficient and accurate phase modulation characteristics test and optimization scheme design,the design of the diffractive efficiency test scheme.The main research contents of this thesis are as follows:(1)The working principle and characteristics of liquid crystal on silicon under different electro-optic effects are introduced,and the anti-parallel electronic birefringence(ECB)working mode of liquid crystal on silicon chip is determined.(2)A new indicator is proposed to judge the quality of liquid crystal on silicon chip,design and build a new approach to testing optical path testing phase of liquid crystal on silicon chip surface,the phase plane type data not only become a kind of new evaluation criterion to judge liquid crystal on silicon l chip quality,can expose the chip issues during the production process.(3)The phase modulation curve of liquid crystal on silicon chip is the important performance indexes,this thesis designed the insertion loss method and a quarter wave plate method these two kinds of simple,accurate and effective scheme of optical test phase modulation characteristic of liquid crystal on silicon chip,and compared with the current widespread use of interferometry test of silicon-based liquid crystal chip,comparing the phase modulation characteristic,according to the results of The insertion loss method and the quarter wave plate method are more efficient,accurate and simple.(4)LCOS as programmable diffractive element,its various times the diffraction efficiency of insertion loss and crosstalk characteristics of WSS module has an important impact,this paper designed a new test liquid crystal on silicon chip load Angle of the diffraction efficiency of a solution,test results showed that the test system can be accurate test chip diffraction efficiency efficiently.