Research On Synchronous Control Method Of H-type Motion Platform Of Machining Center

The H-type motion platform studied in this paper plays an important role in the fields of semiconductor lithography and micro machinery.It has the advantages of large motion range,good positioning accuracy and so on.It is an indispensable part of semiconductor lithography and micro machinery.In H with campaign platform to realize the actual production of the lithography process,considering the H motion platform individual components structure is not standard,poor individual component matching accuracy when installation,and operation parameters perturbation and external disturbances exist in the process of factors,such as easy to H motion platform biaxial synchronous movement problem on both ends of the beam,the sync will produce strong mechanical coupling phenomenon,make the motion platform beam,the H motion platform positioning accuracy is affected,serious when damage to the components or driving element motion platform.Therefore,it is of great significance to study the high precision synchronous control strategy of the H-shaped motion platform driven by two shafts in this paper to improve the tracking and positioning of the platform,and to improve the production precision and efficiency of lithography machine and micro-machine.The important parts of the H-type motion platform studied in this paper are three Permanent Magnet Linear Synchronous Motor(PMLSM).The two PMLSM are installed on the two parallel tracks of the H-type motion platform,which constitute the Y axis of the platform.The third PMLSM is installed on a beam where the X axis of the platform is located.Aiming at the synchronization control problem of H motion platform,the strategy of using adaptive inverse control and improved coupling control algorithm based on nonlinear PID is proposed.The synchronization accuracy and error of the two axes of H motion platform are studied in depth.The main work is as follows:Firstly,the mathematical model of H-shaped motion platform is constructed based on Lagrange principle.In order to design a reasonable controller to complete the biaxial synchronous motion,the accurate modeling of H-type motion platform is the first task to be completed.This part first analyzes the structure of the H-shaped motion platform,then introduces the structure and working principle of the important component of the platform,PMLSM,and establishes a mathematical model for PMLSM.Finally,according to the two-dimensional model of the platform,the Lagrangian principle is used to analyze the entire H-shaped motion.The platform established a dynamic model,which established a good model foundation for the further design of the dual-axis synchronous motion controller.Secondly,in view of the system stability problems caused by the parameter perturbation and load disturbance during the operation of the H-type platform,this paper proposes a method of using an adaptive integral inversion controller,combined with the estimation and compensation effects of the RBF network observer,and design An adaptive integral inversion controller based on the RBF network observer was developed.Simulation experiments show that under the action of the controller,the H-shaped motion platform can significantly reduce the synchronization error and significantly improve the dual-axis synchronization accuracy.At the same time,the system's response characteristics and The anti-interference ability has also improved.Finally,in order to further improve the processing accuracy of the H-shaped motion platform and ensure its single-axis position tracking accuracy and the processing requirements of the synchronization accuracy between the two axes,the method of nonlinear PID improved coupling control is proposed to design the controller,and the coupling error variable is introduced.Combining the characteristics of nonlinear PID with small overshoot and strong anti-interference performance,simulation verification shows that under the action of the controller,the H-type motion platform has better dual-axis tracking performance,small synchronization error,and the system has good performance.Transient response capability and strong anti-interference performance.