| With the development of the communications industry,the amount of data being transmitted in communications networks is growing at an exponential rate and existing electronic communications solutions are approaching their transmission limits.The Array Waveguide Grating(AWG)is a WDM device that is commonly used in WDM systems.The device is prepared using planar waveguide loop(PLC)technology and offers the advantages of low insertion loss,high signal flatness and ease of integration.Polymerbased AWGs are cost-effective,simple and easy to prepare in multiple layers.In this thesis,a polymer waveguide platform has been chosen to develop a three-dimensional photonic device and a two-layer AWG device has been successfully designed and prepared,the main work is summarised as follows:The theory of optical waveguides and AWGs is first discussed,and the design parameters and functional specifications of AWG devices are given to provide a theoretical basis for subsequent simulation design and test analysis.Next,simulation and parameter optimisation of AWG devices were carried out using the effective refractive index method.Four 40-channel AWG devices with different central wavelengths were designed with a wavelength spacing of 200 GHz.The lithographic mask plates of four AWGs were integrated in two layers on the same chip through the design of their structural layout,and through an innovative central mirror symmetry design,the same mask plate was designed to be rotated for two lithographic runs.Finally the bilayer preparation process was carried out and the chip performance tested.In this paper,the ZPU-12 series UV-curable polymer from ChemOptics was used as the preparation material for this design,and a secondary lithography process was used for the lithography negative adhesive.The final test results show that the insertion loss of the AWG chip is between 3.26 dB and 4.65 dB,and the overall bandwidth is 112 nm with less than 1.4 dB insertion loss variation. |
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