Research On W-band Miniaturization Amplifier And Filter Component

Amplifier and filter component is essential in RF front-end circuit,which is combined by a bandpass filter and LNA to amplify and filter RF receiving signals.It affects the performance and size of the electronic system directly.In this paper,the research of W-band amplifier and filter component explores a new silicon-based integration scheme based on MEMS and achieves miniaturization and lightweight of W-band amplifier and filter component,it also breaks the bottleneck of W-band RF system in small equipment.In this paper,SIW bandpass filter and miniaturization amplifier and filter component work at 90-96GHz is studied,designed,and implemented based on a new scheme of MEMS and SIW considering performance,size,process,and innovation.The main contents of this paper are as follows:1.A new scheme of MEMS and SIW is designed and adopted to reduce the circuit size in a W-band RF module which is smaller than 1%of the module with a traditional structure.2.A W-band four-order direct-coupled bandpass filter and two kinds of crosscoupled filters with new structures is studied,designed,and simulated based on the theory of microwave filter.3.W-band amplifier and filter component are studied.The design scheme of the miniaturized component is analyzed,designed,and demonstrated based on performance and size,and the miniaturized amplifier and filter component is simulated.4.The MEMS process steps of double-layer silicon-based SIW are studied and designed,and the W-band double-layer cross-coupled filter and miniaturization amplifier and filter component were fabricated.The filter is about 3.0×2.8×0.8mm3,and the component is about 9.6× 9.0×0.8mm3.5.An accurate and effective test scheme of W-band circuit is designed based on probe platform,and the filter is tested,analyzed,and summarized.