Research On Infrared Sensing Application Of A Novel Bulk Acoustic Wave Resonator Based On Metasurface

Light is one of the important ways for human beings to perceive the world,Invisible infrared radiation(IR)carries a wealth of environmental information.The temperature distribution and chemical composition of objects can be analyzed by IR.Infrared detectors are widely used in all aspects of production and life.Due to the unique quality factor unique to the infrared detector based on the resonant sensing mechanism,it has a significant advantage over other non-resonant devices in sensitivity.The miniaturized,low-power,high-performance uncooled resonant infrared sensor has a broad prospect,which is processed by micro-electromechanical system technology and compatible with standard integrated circuit technology.Infrared spectroscopy is an indispensable chemical analytical technique to determine the functional group of an unknown compound,which is recognized as the "gold standard" for chemical composition analysis.In this paper,the film bulk acoustic resonator array based on plasmonic metasurfaces is proposed,which utilizes the advantages of high-efficiency infrared absorption and high spectral resolution of metasurface to realize chemical analysis based on infrared spectroscopy.Firstly,the theoretical basis of metasurface and resonator and the mechanism of infrared sensing are introduced.The processing flow and the calculation method of performance parameters are explained.The finite element method and finite difference time domain method are used to simulate the structure of metasurface and resonator respectively.Then the design,fabrication and performance test of sensor array are completed,and an infrared test platform is built.The sensor array is used to identify a variety of polymers.By extracting the sensitivity of each resonator to different polymers,the unique identification barcode can be obtained for sample identification,which has good distinction and proves that it has the ability of infrared chemical sensing.In addition,the mixed polymer of different proportions was tested,and a good linear relationship between the mixing proportion and device responsiveness was obtained.The proportion of the mixed polymer can be determined by identifying the bar code,which proves that it has the ability to analyze the composition of the mixed polymer.The plasmonic enhanced resonance infrared detector can detect the infrared transmission spectra of different chemical analytes through a simple frequency sweep.Its fast,accurate and portable characteristics are expected to be applied in the development of infrared chemical composition analysis microsystems.