Research And Application Of Key Technologies For High Efficiency Design Of Pipeline Flexible Heaters

In the semiconductor wafer manufacturing process,the flexible pipe heater is used to heat the pipe system to maintain the stability of the bulk gas after purification,thereby ensuring the quality of the wafer.With the increase of industrial demand,it is an inevitable trend for enterprises to improve the design efficiency of heaters while ensuring product quality.At present,due to the large number of pipe fitting models in the pipeline system,the design process of repeated modeling and assembly,the cumbersome arrangement design of the heating wires in the heater,a lot of time and labor costs are put for designing a flexible pipeline heater with CAD software.In this regard,this article aims at shortening the design cycle,and studies the key technologies for efficient design of flexible pipeline heaters.First of all,aiming at the design redundancy caused by the large number of serialized components in the pipeline system,the parametric design method of the joint implementation of the configuration parts library and the size-driven method was studied based on the Solid Works.And the capture algorithm was designed to recognize the target constraint elements to complete the automatic assembly of the fittings,and promote the rapid establishment of the three-dimensional model of the pipeline system.Secondly,in the face of the problem of labeling engineering drawings,by dividing the labeling area,the linear size labeling layout could be adaptively adjusted.Based on the meshing method and the retroactive search method of dynamically expanding the label space,the problem of automatic distribution of heater description code annotations was solved.Finally,based on the Auto CAD software platform,a heating wire wiring system was developed,and a weighted KNN algorithm was introduced to generate a classification model,which realized the intelligent selection of the heating wire wiring structure.Through the optimization method of the wiring design,the optimal strategy of the heating wire arrangement was quickly determined,the wiring efficiency was improved,and the wiring quality was guaranteed.In practical applications,the key technology of efficient design of flexible pipeline heaters was used to help designers get rid of complicated and tedious design processes.The heater design efficiency had been greatly improved,the design cycle had been shortened,and market demands could be responded quickly.