Research Of Metal Oxide Thin Film Transistor Controlled By Triboelectric Potential

As one of the essential components in intelligents system for direct interaction with ambient environment,tactile sensors have attracted extensive attention due to their real-time sensing ability and prospective applications in many fields such as human-machine interaction,intelligent robot control and feedback,human prostheses and minimally invasive surgery.Meanwhile,with the advent of the Internet of things era,human society has a greater demand for micro intelligent nodes such as self-driven sensors.This paper mainly focuses on the applications of triboelectric nano generator in tactile sensing and self-driven sensing.A monolithic integrated indium gallium zinc oxide(InGaZnO)thin film transistor(TFT)tactile sensor array which is developed for high-resolution tactile sensing and detection and a photo-driven paper-based graphene/BOPP composite film for self-driven sensing are proposed.The proposed tactile sensor consists of an InGaZnO TFT and a triboelectric nanogenerator working in the contact/separation mode.The current in the InGaZnO TFT can be modulated by the triboelectronic charges generated by the firction of the movable Al layer and Al₂O₃ layer.The fabrication condition of the tactile sensor cell and array is explored.By using the conventional semiconductor fabrication method,a high-resolution monolithic integrated 5×5tribotronic InGaZnO TFT array is realized as a prototype for tactile detection.In order to investigate the performance of the tactile sensor array,a testing platform is established and a comprehensive visual system is also developed to exhibit its potential applications.The experimental results show that this tactile sensor unit is sensitive to external touch.The current increases from 1.6 nA to 20.9 nA when responding to external contact and the response time is around 150 ms,and the current on-off ratio reaches 12.7.Cyclic test results show that the tactile sensor remains stable after 200 cycles,and the attenuation rate is only 4.68%.Combined with a multi-channel test system and a visual data processing system,this array device can realize tactile perception and motion tracking with a millimeter accuracy,and is highly promising in large scale tactile dectection.This work also presents a photo-driven paper-based graphene/BOPP composite film sensor for self-driven sensing,and preparation process is introduced.The proposed self-driven system with double-layer structure can respond to near-infrared light and the composite film can be driven reversibly under a near-infrared light source with a power density of 144.5 m W·cm^-1.The minimum bending radius of the film is 2.7 cm and the relative bending angle reaches 42 ^o.Then,the paper-based graphene/BOPP composite film was assembled as a movable friction layer with PTFE film to form a contact separation triboelectric nanogenerator,and the triboelectric signals caused by mechanical deformation caused by light are tested.The experimental results show that the device can output about 0.5 V-3.5 V pulse signal independently without external power supply.The device is expected to be integrated into self-driven micro systems,and has potential applications in smart city,smart agriculture,national defense and military fields.