Evaluation Of Microstructure Characteristics Of Surface & Subsurface Based On Fringe Reflection And Spectra Difference

With the high-speed development of modern manufacturing,the product quality requirements are more and more severe.In particular,the surface and subsurface quality of optical elements is often fatal to the entire optical system.In this paper,optical glass surface and subsurface defect detection were studied in order to realize high accuracy and fast detection of optical element quality.The surface defect detection technology based on fringe reflection method for different optical specular surface defect on the position detection and quantitative analysis,solved the problem about large diameter and high precision detection problem of free-form surface specular.This paper dealt with the theory of terahertz time-domain spectroscopy(THz-TDS)for the detection of optical glass subsurface defects.By measuring and calculating the optical parameters of terahertz spectrum frequencies to quantitative analysis of the stress,the size of the object to determine the optical glass and distribution of subsurface defects.It provides a new nondestructive testing train of thought for the subsurface.This paper mainly studied these contents,Studying the measurement principle of specular defect detection based on fringe reflection method,analyzing the reflection stripe test used several significance technologies,and the calibration of the measuring system principle and the model is studied.The surface defect detection experiment system based on the fringe reflection method was built,and the measuring system is calibrated,and the calibration error is not more than3%.Experimenting on the large diameter of hyperboloid specular and the plane specular with defects,the experimental results on the surface of the method is used for specular surface defect detection with high accuracy and fast speed,which laied a solid foundation for online detection in industrial manufacturing.Studying the optical glass subsurface defects formation mechanism and the influence on optical properties,and analyzing the principle of stress optical effect of optical glass,in order to realize terahertz spectrum detection object and the surface defects.Analyzing the principle of THz-TDS is used for optical glass subsurface defect detection.Then,building up a theory that visual defects from the terahertz difference spectrum and analysis method.Which provides a new train of thought to realizing optical glass subsurface defects nondestructive quantitative detection.